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- W2053203977 abstract "For inspection of high aspect ratio structures like narrow semiconductor trenches, a thin membrane probe and a new force detection method have been proposed. Instead of conventional conical and pyramidal tips, a thin silicon nitride cantilever was set up vertically, and its edge was used as a tip. The membrane probe named as twist-probe (TP) was oscillated in the twisting resonance to detect a force from both vertical and lateral directions. About 100 μm long, 0.7 μm thick TP was fabricated as a trial. Amplitude versus distance curve measurements showed that the TP has a high spacing change sensitivity between the tip and a sample in both vertical and lateral directions. A trench cross-section imaging was demonstrated successfully with a TP and the twist resonant force detection method." @default.
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- W2053203977 date "1999-04-01" @default.
- W2053203977 modified "2023-10-16" @default.
- W2053203977 title "Novel thin membrane probe and a new twisting modulation force detection method of an atomic force microscope" @default.
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- W2053203977 doi "https://doi.org/10.1063/1.1149708" @default.
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