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• W2053204255 endingPage "248" @default.
• W2053204255 startingPage "248" @default.
• W2053204255 abstract "The crystal structure of tantalum nitrides is examined by X-ray and electron diffraction techniques and the following seven phases are identified: TaN ∼0.05 (cubic, β-phase), Ta 2 N (hexagonal, γ-phase), δ-TaN (hexagonal), ε -TaN (hexagonal), Ta 5 N 6 (hexagonal), Ta 4 N 5 (tetragonal) and Ta 3 N 5 (tetragonal or monoclinic). Thin films of Ta nitrides for electron diffraction study were prepared by nitriding thin evaporated films of tantalum in ammonia and nitrogen. By heating thin films of Ta 3 N 5 in vacuum, the phase transformations occur successively as follows: Ta 3 N 5 →Ta 4 N 5 →Ta 5 N 6 → ε -TaN→Ta 2 N. The stucture of each nitride form is discussed." @default.
• W2053204255 created "2016-06-24" @default.
• W2053204255 creator A5062212909 @default.
• W2053204255 date "1971-02-01" @default.
• W2053204255 modified "2023-10-10" @default.
• W2053204255 title "Structure of Tantalum Nitrides" @default.
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• W2053204255 doi "https://doi.org/10.1143/jjap.10.248" @default.
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