Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053264976> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2053264976 abstract "© 2014 IEEE. This paper presents an experimentally verified geometry dependent predictive FEM model of a high temperature closed membrane thermal conductivity sensor. The sensor was developed using SOI CMOS MEMS technology. The FEM model presents a systematic approach to design thermal conductivity sensors by understanding heat transfer mechanisms between the sensor and the analyte environment. It also discusses how response time and sensor sensitivity are influenced by geometry of the sensor. The sensor was fabricated at a commercial foundry using a 1 μm process and measures only 1×1 mm 2 . The model establishes that a tradeoff is required between power consumption, response time and sensitivity based on the end user application." @default.
- W2053264976 created "2016-06-24" @default.
- W2053264976 creator A5004636057 @default.
- W2053264976 creator A5039300935 @default.
- W2053264976 creator A5066534887 @default.
- W2053264976 creator A5088448927 @default.
- W2053264976 date "2014-11-01" @default.
- W2053264976 modified "2023-09-26" @default.
- W2053264976 title "A geometry dependent predictive FEM model of a high temperature closed membrane SOI CMOS MEMS thermal conductivity sensor" @default.
- W2053264976 cites W1503192912 @default.
- W2053264976 cites W1999296257 @default.
- W2053264976 cites W2018008363 @default.
- W2053264976 cites W2054418166 @default.
- W2053264976 cites W2055273931 @default.
- W2053264976 cites W2078159969 @default.
- W2053264976 cites W2098044815 @default.
- W2053264976 doi "https://doi.org/10.1109/icsens.2014.6985071" @default.
- W2053264976 hasPublicationYear "2014" @default.
- W2053264976 type Work @default.
- W2053264976 sameAs 2053264976 @default.
- W2053264976 citedByCount "0" @default.
- W2053264976 crossrefType "proceedings-article" @default.
- W2053264976 hasAuthorship W2053264976A5004636057 @default.
- W2053264976 hasAuthorship W2053264976A5039300935 @default.
- W2053264976 hasAuthorship W2053264976A5066534887 @default.
- W2053264976 hasAuthorship W2053264976A5088448927 @default.
- W2053264976 hasConcept C121332964 @default.
- W2053264976 hasConcept C127413603 @default.
- W2053264976 hasConcept C135628077 @default.
- W2053264976 hasConcept C153294291 @default.
- W2053264976 hasConcept C159985019 @default.
- W2053264976 hasConcept C192562407 @default.
- W2053264976 hasConcept C204530211 @default.
- W2053264976 hasConcept C21200559 @default.
- W2053264976 hasConcept C24326235 @default.
- W2053264976 hasConcept C37977207 @default.
- W2053264976 hasConcept C46362747 @default.
- W2053264976 hasConcept C49040817 @default.
- W2053264976 hasConcept C50517652 @default.
- W2053264976 hasConcept C53143962 @default.
- W2053264976 hasConcept C544956773 @default.
- W2053264976 hasConcept C57879066 @default.
- W2053264976 hasConcept C66938386 @default.
- W2053264976 hasConcept C78519656 @default.
- W2053264976 hasConcept C97346530 @default.
- W2053264976 hasConceptScore W2053264976C121332964 @default.
- W2053264976 hasConceptScore W2053264976C127413603 @default.
- W2053264976 hasConceptScore W2053264976C135628077 @default.
- W2053264976 hasConceptScore W2053264976C153294291 @default.
- W2053264976 hasConceptScore W2053264976C159985019 @default.
- W2053264976 hasConceptScore W2053264976C192562407 @default.
- W2053264976 hasConceptScore W2053264976C204530211 @default.
- W2053264976 hasConceptScore W2053264976C21200559 @default.
- W2053264976 hasConceptScore W2053264976C24326235 @default.
- W2053264976 hasConceptScore W2053264976C37977207 @default.
- W2053264976 hasConceptScore W2053264976C46362747 @default.
- W2053264976 hasConceptScore W2053264976C49040817 @default.
- W2053264976 hasConceptScore W2053264976C50517652 @default.
- W2053264976 hasConceptScore W2053264976C53143962 @default.
- W2053264976 hasConceptScore W2053264976C544956773 @default.
- W2053264976 hasConceptScore W2053264976C57879066 @default.
- W2053264976 hasConceptScore W2053264976C66938386 @default.
- W2053264976 hasConceptScore W2053264976C78519656 @default.
- W2053264976 hasConceptScore W2053264976C97346530 @default.
- W2053264976 hasLocation W20532649761 @default.
- W2053264976 hasOpenAccess W2053264976 @default.
- W2053264976 hasPrimaryLocation W20532649761 @default.
- W2053264976 hasRelatedWork W1975118583 @default.
- W2053264976 hasRelatedWork W1987031878 @default.
- W2053264976 hasRelatedWork W2010890382 @default.
- W2053264976 hasRelatedWork W2037001011 @default.
- W2053264976 hasRelatedWork W2067763447 @default.
- W2053264976 hasRelatedWork W2068507054 @default.
- W2053264976 hasRelatedWork W2080662687 @default.
- W2053264976 hasRelatedWork W2085070474 @default.
- W2053264976 hasRelatedWork W2100356042 @default.
- W2053264976 hasRelatedWork W2119390501 @default.
- W2053264976 hasRelatedWork W2166884695 @default.
- W2053264976 hasRelatedWork W2171656064 @default.
- W2053264976 hasRelatedWork W2357252954 @default.
- W2053264976 hasRelatedWork W2514858717 @default.
- W2053264976 hasRelatedWork W2516131068 @default.
- W2053264976 hasRelatedWork W2536959185 @default.
- W2053264976 hasRelatedWork W2753621677 @default.
- W2053264976 hasRelatedWork W2909263602 @default.
- W2053264976 hasRelatedWork W2996792989 @default.
- W2053264976 hasRelatedWork W3007509093 @default.
- W2053264976 isParatext "false" @default.
- W2053264976 isRetracted "false" @default.
- W2053264976 magId "2053264976" @default.
- W2053264976 workType "article" @default.