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• W2053354927 abstract "The continuous integrated circuit miniaturization and the shrinkage of critical dimension (CD) have pushed the development of optical proximity correction (OPC), and also making CD more sensitive to process variations. Traditional OPC optimizes mask patterns at nominal lithography conditions, which may lead to poor performance with process variations. Hence, OPC software nowadays needs to take different process conditions into consideration to enhance the robustness of layout patterns. In this paper, we propose an algorithm which considers the defocus as a random variable when incorporating it into an inverse imaging framework to optimize the input mask, in order to gain more robustness for a wider range of focus errors. The optimal mask is calculated in a statistical manner by minimizing the expected difference between output patterns at different defocus conditions and the target pattern. With the necessary tradeoff in the close proximity of the nominal focus condition, the optimized mask gives more robust performance under a wider range of focus errors." @default.
• W2053354927 created "2016-06-24" @default.
• W2053354927 creator A5004440952 @default.
• W2053354927 creator A5008832723 @default.
• W2053354927 creator A5044908290 @default.
• W2053354927 date "2008-11-20" @default.
• W2053354927 modified "2023-09-26" @default.
• W2053354927 title "Robust mask design with defocus variation using inverse synthesis" @default.
• W2053354927 cites W1594489858 @default.
• W2053354927 cites W1658472922 @default.
• W2053354927 cites W1839775469 @default.
• W2053354927 cites W1974733344 @default.
• W2053354927 cites W1978481480 @default.
• W2053354927 cites W1979556467 @default.
• W2053354927 cites W1995125212 @default.
• W2053354927 cites W2053901845 @default.
• W2053354927 cites W2065950608 @default.
• W2053354927 cites W2069004321 @default.
• W2053354927 cites W2074803427 @default.
• W2053354927 cites W2077123400 @default.
• W2053354927 cites W2080855665 @default.
• W2053354927 cites W2108782500 @default.
• W2053354927 cites W2121030977 @default.
• W2053354927 cites W2128294987 @default.
• W2053354927 cites W2129996279 @default.
• W2053354927 cites W3173138228 @default.
• W2053354927 doi "https://doi.org/10.1117/12.804681" @default.
• W2053354927 hasPublicationYear "2008" @default.
• W2053354927 type Work @default.
• W2053354927 sameAs 2053354927 @default.
• W2053354927 citedByCount "20" @default.
• W2053354927 countsByYear W20533549272012 @default.
• W2053354927 countsByYear W20533549272013 @default.
• W2053354927 countsByYear W20533549272014 @default.
• W2053354927 countsByYear W20533549272015 @default.
• W2053354927 countsByYear W20533549272017 @default.
• W2053354927 countsByYear W20533549272019 @default.
• W2053354927 countsByYear W20533549272023 @default.
• W2053354927 crossrefType "proceedings-article" @default.
• W2053354927 hasAuthorship W2053354927A5004440952 @default.
• W2053354927 hasAuthorship W2053354927A5008832723 @default.
• W2053354927 hasAuthorship W2053354927A5044908290 @default.
• W2053354927 hasConcept C104317684 @default.
• W2053354927 hasConcept C105487726 @default.
• W2053354927 hasConcept C111919701 @default.
• W2053354927 hasConcept C11413529 @default.
• W2053354927 hasConcept C120665830 @default.
• W2053354927 hasConcept C121332964 @default.
• W2053354927 hasConcept C127413603 @default.
• W2053354927 hasConcept C171250308 @default.
• W2053354927 hasConcept C185592680 @default.
• W2053354927 hasConcept C192209626 @default.
• W2053354927 hasConcept C192562407 @default.
• W2053354927 hasConcept C204223013 @default.
• W2053354927 hasConcept C207467116 @default.
• W2053354927 hasConcept C207789793 @default.
• W2053354927 hasConcept C2524010 @default.
• W2053354927 hasConcept C33923547 @default.
• W2053354927 hasConcept C41008148 @default.
• W2053354927 hasConcept C55493867 @default.
• W2053354927 hasConcept C57528182 @default.
• W2053354927 hasConcept C62064638 @default.
• W2053354927 hasConcept C63479239 @default.
• W2053354927 hasConcept C78371743 @default.
• W2053354927 hasConcept C78519656 @default.
• W2053354927 hasConcept C93389723 @default.
• W2053354927 hasConcept C98045186 @default.
• W2053354927 hasConceptScore W2053354927C104317684 @default.
• W2053354927 hasConceptScore W2053354927C105487726 @default.
• W2053354927 hasConceptScore W2053354927C111919701 @default.
• W2053354927 hasConceptScore W2053354927C11413529 @default.
• W2053354927 hasConceptScore W2053354927C120665830 @default.
• W2053354927 hasConceptScore W2053354927C121332964 @default.
• W2053354927 hasConceptScore W2053354927C127413603 @default.
• W2053354927 hasConceptScore W2053354927C171250308 @default.
• W2053354927 hasConceptScore W2053354927C185592680 @default.
• W2053354927 hasConceptScore W2053354927C192209626 @default.
• W2053354927 hasConceptScore W2053354927C192562407 @default.
• W2053354927 hasConceptScore W2053354927C204223013 @default.
• W2053354927 hasConceptScore W2053354927C207467116 @default.
• W2053354927 hasConceptScore W2053354927C207789793 @default.
• W2053354927 hasConceptScore W2053354927C2524010 @default.
• W2053354927 hasConceptScore W2053354927C33923547 @default.
• W2053354927 hasConceptScore W2053354927C41008148 @default.
• W2053354927 hasConceptScore W2053354927C55493867 @default.
• W2053354927 hasConceptScore W2053354927C57528182 @default.
• W2053354927 hasConceptScore W2053354927C62064638 @default.
• W2053354927 hasConceptScore W2053354927C63479239 @default.
• W2053354927 hasConceptScore W2053354927C78371743 @default.
• W2053354927 hasConceptScore W2053354927C78519656 @default.
• W2053354927 hasConceptScore W2053354927C93389723 @default.
• W2053354927 hasConceptScore W2053354927C98045186 @default.
• W2053354927 hasLocation W20533549271 @default.
• W2053354927 hasOpenAccess W2053354927 @default.
• W2053354927 hasPrimaryLocation W20533549271 @default.
• W2053354927 hasRelatedWork W1983396629 @default.
• W2053354927 hasRelatedWork W1987855151 @default.
• W2053354927 hasRelatedWork W1994501859 @default.
• W2053354927 hasRelatedWork W2015968486 @default.
• W2053354927 hasRelatedWork W2020117440 @default.

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