Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053532010> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- W2053532010 abstract "The dependency of wafer flatness on high temperature and Chemical Vapor Deposition (CVD) processes has been quantified for a 400 gate array bipolar process. Experimental data is presented which describes wafer flatness variations at six critical front-end process steps.© (1982) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2053532010 created "2016-06-24" @default.
- W2053532010 creator A5062581794 @default.
- W2053532010 date "1982-10-15" @default.
- W2053532010 modified "2023-09-23" @default.
- W2053532010 title "<title>Temperature and Chemical Vapor Deposition (CVD) film effects on wafer flatness</title>" @default.
- W2053532010 doi "https://doi.org/10.1117/12.933684" @default.
- W2053532010 hasPublicationYear "1982" @default.
- W2053532010 type Work @default.
- W2053532010 sameAs 2053532010 @default.
- W2053532010 citedByCount "1" @default.
- W2053532010 crossrefType "proceedings-article" @default.
- W2053532010 hasAuthorship W2053532010A5062581794 @default.
- W2053532010 hasConcept C120665830 @default.
- W2053532010 hasConcept C121332964 @default.
- W2053532010 hasConcept C151857401 @default.
- W2053532010 hasConcept C160671074 @default.
- W2053532010 hasConcept C171250308 @default.
- W2053532010 hasConcept C183866003 @default.
- W2053532010 hasConcept C19067145 @default.
- W2053532010 hasConcept C192562407 @default.
- W2053532010 hasConcept C26405456 @default.
- W2053532010 hasConcept C2778530986 @default.
- W2053532010 hasConcept C49040817 @default.
- W2053532010 hasConcept C57410435 @default.
- W2053532010 hasConcept C62520636 @default.
- W2053532010 hasConcept C75937256 @default.
- W2053532010 hasConceptScore W2053532010C120665830 @default.
- W2053532010 hasConceptScore W2053532010C121332964 @default.
- W2053532010 hasConceptScore W2053532010C151857401 @default.
- W2053532010 hasConceptScore W2053532010C160671074 @default.
- W2053532010 hasConceptScore W2053532010C171250308 @default.
- W2053532010 hasConceptScore W2053532010C183866003 @default.
- W2053532010 hasConceptScore W2053532010C19067145 @default.
- W2053532010 hasConceptScore W2053532010C192562407 @default.
- W2053532010 hasConceptScore W2053532010C26405456 @default.
- W2053532010 hasConceptScore W2053532010C2778530986 @default.
- W2053532010 hasConceptScore W2053532010C49040817 @default.
- W2053532010 hasConceptScore W2053532010C57410435 @default.
- W2053532010 hasConceptScore W2053532010C62520636 @default.
- W2053532010 hasConceptScore W2053532010C75937256 @default.
- W2053532010 hasLocation W20535320101 @default.
- W2053532010 hasOpenAccess W2053532010 @default.
- W2053532010 hasPrimaryLocation W20535320101 @default.
- W2053532010 hasRelatedWork W172703552 @default.
- W2053532010 hasRelatedWork W2020819226 @default.
- W2053532010 hasRelatedWork W2032275822 @default.
- W2053532010 hasRelatedWork W2146609938 @default.
- W2053532010 hasRelatedWork W2524849471 @default.
- W2053532010 hasRelatedWork W829865832 @default.
- W2053532010 hasRelatedWork W2295922127 @default.
- W2053532010 hasRelatedWork W2297248045 @default.
- W2053532010 hasRelatedWork W2416270205 @default.
- W2053532010 hasRelatedWork W2807874185 @default.
- W2053532010 hasRelatedWork W2811975430 @default.
- W2053532010 hasRelatedWork W2818586536 @default.
- W2053532010 hasRelatedWork W2825688520 @default.
- W2053532010 hasRelatedWork W2828620841 @default.
- W2053532010 hasRelatedWork W2861324394 @default.
- W2053532010 hasRelatedWork W2864552734 @default.
- W2053532010 hasRelatedWork W2873367563 @default.
- W2053532010 hasRelatedWork W2931017639 @default.
- W2053532010 hasRelatedWork W3133406591 @default.
- W2053532010 hasRelatedWork W3148079627 @default.
- W2053532010 isParatext "false" @default.
- W2053532010 isRetracted "false" @default.
- W2053532010 magId "2053532010" @default.
- W2053532010 workType "article" @default.