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- W2053575008 abstract "We report the formation of high aspect ratio ∼0.3 (height/width) oxide features with noncontact mode atomic force microscopy assisted lithography. The process requires high humidity levels, series of short pulses <100 ns, high voltage level >25 V, a tip oscillation amplitude ∼20 nm, and feedback “on.” We also show that the application of a voltage at magnitude higher than a certain limit damages the surface." @default.
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- W2053575008 date "2003-11-01" @default.
- W2053575008 modified "2023-09-26" @default.
- W2053575008 title "High aspect ratio nano-oxidation of silicon with noncontact atomic force microscopy" @default.
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- W2053575008 doi "https://doi.org/10.1116/1.1620513" @default.
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