Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053705323> ?p ?o ?g. }
- W2053705323 endingPage "375301" @default.
- W2053705323 startingPage "375301" @default.
- W2053705323 abstract "A method for single-step fabrication of arbitrary, complex, three-dimensional (3D) silicon structures from the nano- to millimeter-scale at multiple levels on non-planar, curved, or domed surfaces is reported. The fabrication is based on focused or masked ion beam irradiation of p-type silicon followed by electrochemical anodization. The process allows fabrication of a wide range of surface features at multiple heights and with arbitrary orientations by varying the irradiated feature width, ion type, energy fluence, and subsequent anodization conditions. The technology has achieved depth resolution of 10 nm as step heights and is capable of creating lateral features down to 7 nm at high aspect ratios of up to 40, with surface roughness down to 1 nm scaled up to full wafer areas. The single-step ability has seamlessly interfaced a network of complex, integrated micro- to nano-structures in 3D orientations with no alignment required. The final template has been converted to a master copy for nano-imprinting lithography of 3D fluidic structures and optical components." @default.
- W2053705323 created "2016-06-24" @default.
- W2053705323 creator A5058557992 @default.
- W2053705323 creator A5071432172 @default.
- W2053705323 creator A5077883331 @default.
- W2053705323 creator A5076336466 @default.
- W2053705323 date "2014-08-22" @default.
- W2053705323 modified "2023-09-26" @default.
- W2053705323 title "Fabrication of silicon molds with multi-level, non-planar, micro- and nano-scale features" @default.
- W2053705323 cites W1594602867 @default.
- W2053705323 cites W1642540027 @default.
- W2053705323 cites W1655034548 @default.
- W2053705323 cites W1676421722 @default.
- W2053705323 cites W1679395621 @default.
- W2053705323 cites W1964546143 @default.
- W2053705323 cites W1973318486 @default.
- W2053705323 cites W1974758594 @default.
- W2053705323 cites W1977675747 @default.
- W2053705323 cites W1979545057 @default.
- W2053705323 cites W1980972749 @default.
- W2053705323 cites W1982381330 @default.
- W2053705323 cites W1983775829 @default.
- W2053705323 cites W1985793906 @default.
- W2053705323 cites W1990342431 @default.
- W2053705323 cites W1997214116 @default.
- W2053705323 cites W1999670237 @default.
- W2053705323 cites W2002483663 @default.
- W2053705323 cites W2002793890 @default.
- W2053705323 cites W2006882080 @default.
- W2053705323 cites W2017878198 @default.
- W2053705323 cites W2025191459 @default.
- W2053705323 cites W2028256739 @default.
- W2053705323 cites W2035515924 @default.
- W2053705323 cites W2049067537 @default.
- W2053705323 cites W2053759835 @default.
- W2053705323 cites W2054635074 @default.
- W2053705323 cites W2056016739 @default.
- W2053705323 cites W2058326937 @default.
- W2053705323 cites W2062996256 @default.
- W2053705323 cites W2070623405 @default.
- W2053705323 cites W2072987543 @default.
- W2053705323 cites W2075026512 @default.
- W2053705323 cites W2076967705 @default.
- W2053705323 cites W2084044385 @default.
- W2053705323 cites W2087600659 @default.
- W2053705323 cites W2090504476 @default.
- W2053705323 cites W2090572943 @default.
- W2053705323 cites W2101362243 @default.
- W2053705323 cites W2102770287 @default.
- W2053705323 cites W2103157865 @default.
- W2053705323 cites W2109168464 @default.
- W2053705323 cites W2111811045 @default.
- W2053705323 cites W2112357515 @default.
- W2053705323 cites W2118166595 @default.
- W2053705323 cites W2123712230 @default.
- W2053705323 cites W2134422882 @default.
- W2053705323 cites W2147052133 @default.
- W2053705323 cites W2149469282 @default.
- W2053705323 cites W2152123134 @default.
- W2053705323 cites W2161824899 @default.
- W2053705323 cites W2168704681 @default.
- W2053705323 cites W2321588256 @default.
- W2053705323 cites W2324981682 @default.
- W2053705323 cites W2496933069 @default.
- W2053705323 cites W3106143199 @default.
- W2053705323 cites W3175709650 @default.
- W2053705323 cites W4231296216 @default.
- W2053705323 cites W4232354314 @default.
- W2053705323 cites W4247122514 @default.
- W2053705323 cites W4251264148 @default.
- W2053705323 cites W4251307565 @default.
- W2053705323 cites W4254202363 @default.
- W2053705323 doi "https://doi.org/10.1088/0957-4484/25/37/375301" @default.
- W2053705323 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25148117" @default.
- W2053705323 hasPublicationYear "2014" @default.
- W2053705323 type Work @default.
- W2053705323 sameAs 2053705323 @default.
- W2053705323 citedByCount "3" @default.
- W2053705323 countsByYear W20537053232016 @default.
- W2053705323 countsByYear W20537053232021 @default.
- W2053705323 crossrefType "journal-article" @default.
- W2053705323 hasAuthorship W2053705323A5058557992 @default.
- W2053705323 hasAuthorship W2053705323A5071432172 @default.
- W2053705323 hasAuthorship W2053705323A5076336466 @default.
- W2053705323 hasAuthorship W2053705323A5077883331 @default.
- W2053705323 hasConcept C120665830 @default.
- W2053705323 hasConcept C121332964 @default.
- W2053705323 hasConcept C121684516 @default.
- W2053705323 hasConcept C134786449 @default.
- W2053705323 hasConcept C136525101 @default.
- W2053705323 hasConcept C142724271 @default.
- W2053705323 hasConcept C159985019 @default.
- W2053705323 hasConcept C160671074 @default.
- W2053705323 hasConcept C171250308 @default.
- W2053705323 hasConcept C192562407 @default.
- W2053705323 hasConcept C204223013 @default.
- W2053705323 hasConcept C204787440 @default.
- W2053705323 hasConcept C22016385 @default.