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- W2053740757 abstract "Abstract CO 2 -based supercritical fluid deposition (SCFD) was utilized for the synthesis of ruthenium nanostructures on Si substrates and hafnium oxide (HfO 2 ) films. Ru nanodots were formed by the reduction of a Ru precursor under a hydrogen environment. Ruthenium carbonyl was dissolved in supercritical CO 2 in a pre-mix vessel, and this mixture was pumped into a reaction vessel which allowed it to undergo rapid expansion. The formation of Ru nanodots was studied as a function of key process parameters such as the weight of precursor used, the reaction temperature and the H 2 reactant pressure. Utilizing the Ru nanodots on a HfO 2 control oxide, a flash memory device containing nanodots was fabricated and its memory characteristics were demonstrated." @default.
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- W2053740757 date "2013-05-01" @default.
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- W2053740757 title "Ru nanodot synthesis using CO2 supercritical fluid deposition" @default.
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- W2053740757 doi "https://doi.org/10.1016/j.jpcs.2012.12.022" @default.
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