Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053797609> ?p ?o ?g. }
- W2053797609 endingPage "327" @default.
- W2053797609 startingPage "324" @default.
- W2053797609 abstract "Compressively stressed SiO2 films are deposited by rf magnetron sputtering onto polymethylmethacrylate- (PMMA) coated Si substrates. The oxide film roughens by wrinkling during deposition; wrinkling is enabled by the viscous flow of the PMMA layer. The nanoscale lateral length scale of the wrinkling, ∼120nm, is established during the first few nanometers of film deposition and is controlled by the thickness and stress of the SiO2 film at the onset of the instability. Continued deposition of SiO2 leads to a rapid increase and then saturation of the rms roughness at ∼5nm." @default.
- W2053797609 created "2016-06-24" @default.
- W2053797609 creator A5001475799 @default.
- W2053797609 creator A5005340927 @default.
- W2053797609 creator A5085632540 @default.
- W2053797609 date "2006-02-21" @default.
- W2053797609 modified "2023-09-23" @default.
- W2053797609 title "Stress-induced wrinkling of sputtered SiO2 films on polymethylmethacrylate" @default.
- W2053797609 cites W1490637938 @default.
- W2053797609 cites W1612694341 @default.
- W2053797609 cites W1964554402 @default.
- W2053797609 cites W1966417765 @default.
- W2053797609 cites W1972173145 @default.
- W2053797609 cites W1972609815 @default.
- W2053797609 cites W1976534351 @default.
- W2053797609 cites W1984014126 @default.
- W2053797609 cites W1984148065 @default.
- W2053797609 cites W2014516678 @default.
- W2053797609 cites W2040332050 @default.
- W2053797609 cites W2043206806 @default.
- W2053797609 cites W2066207084 @default.
- W2053797609 cites W2068939802 @default.
- W2053797609 cites W2069677915 @default.
- W2053797609 cites W2077400337 @default.
- W2053797609 cites W2084017416 @default.
- W2053797609 cites W2085955437 @default.
- W2053797609 cites W2092504928 @default.
- W2053797609 cites W2096162791 @default.
- W2053797609 cites W2128234082 @default.
- W2053797609 cites W2167196692 @default.
- W2053797609 doi "https://doi.org/10.1116/1.2171711" @default.
- W2053797609 hasPublicationYear "2006" @default.
- W2053797609 type Work @default.
- W2053797609 sameAs 2053797609 @default.
- W2053797609 citedByCount "14" @default.
- W2053797609 countsByYear W20537976092012 @default.
- W2053797609 countsByYear W20537976092014 @default.
- W2053797609 countsByYear W20537976092015 @default.
- W2053797609 countsByYear W20537976092017 @default.
- W2053797609 countsByYear W20537976092020 @default.
- W2053797609 countsByYear W20537976092021 @default.
- W2053797609 crossrefType "journal-article" @default.
- W2053797609 hasAuthorship W2053797609A5001475799 @default.
- W2053797609 hasAuthorship W2053797609A5005340927 @default.
- W2053797609 hasAuthorship W2053797609A5085632540 @default.
- W2053797609 hasConcept C107365816 @default.
- W2053797609 hasConcept C114614502 @default.
- W2053797609 hasConcept C123408415 @default.
- W2053797609 hasConcept C127313418 @default.
- W2053797609 hasConcept C138885662 @default.
- W2053797609 hasConcept C151730666 @default.
- W2053797609 hasConcept C159985019 @default.
- W2053797609 hasConcept C171250308 @default.
- W2053797609 hasConcept C19067145 @default.
- W2053797609 hasConcept C192562407 @default.
- W2053797609 hasConcept C21036866 @default.
- W2053797609 hasConcept C22423302 @default.
- W2053797609 hasConcept C2779227376 @default.
- W2053797609 hasConcept C2816523 @default.
- W2053797609 hasConcept C33923547 @default.
- W2053797609 hasConcept C41895202 @default.
- W2053797609 hasConcept C45206210 @default.
- W2053797609 hasConcept C61427134 @default.
- W2053797609 hasConcept C64297162 @default.
- W2053797609 hasConcept C71039073 @default.
- W2053797609 hasConcept C77066764 @default.
- W2053797609 hasConcept C9930424 @default.
- W2053797609 hasConceptScore W2053797609C107365816 @default.
- W2053797609 hasConceptScore W2053797609C114614502 @default.
- W2053797609 hasConceptScore W2053797609C123408415 @default.
- W2053797609 hasConceptScore W2053797609C127313418 @default.
- W2053797609 hasConceptScore W2053797609C138885662 @default.
- W2053797609 hasConceptScore W2053797609C151730666 @default.
- W2053797609 hasConceptScore W2053797609C159985019 @default.
- W2053797609 hasConceptScore W2053797609C171250308 @default.
- W2053797609 hasConceptScore W2053797609C19067145 @default.
- W2053797609 hasConceptScore W2053797609C192562407 @default.
- W2053797609 hasConceptScore W2053797609C21036866 @default.
- W2053797609 hasConceptScore W2053797609C22423302 @default.
- W2053797609 hasConceptScore W2053797609C2779227376 @default.
- W2053797609 hasConceptScore W2053797609C2816523 @default.
- W2053797609 hasConceptScore W2053797609C33923547 @default.
- W2053797609 hasConceptScore W2053797609C41895202 @default.
- W2053797609 hasConceptScore W2053797609C45206210 @default.
- W2053797609 hasConceptScore W2053797609C61427134 @default.
- W2053797609 hasConceptScore W2053797609C64297162 @default.
- W2053797609 hasConceptScore W2053797609C71039073 @default.
- W2053797609 hasConceptScore W2053797609C77066764 @default.
- W2053797609 hasConceptScore W2053797609C9930424 @default.
- W2053797609 hasIssue "2" @default.
- W2053797609 hasLocation W20537976091 @default.
- W2053797609 hasOpenAccess W2053797609 @default.
- W2053797609 hasPrimaryLocation W20537976091 @default.
- W2053797609 hasRelatedWork W1968373997 @default.
- W2053797609 hasRelatedWork W2019423004 @default.
- W2053797609 hasRelatedWork W2023571262 @default.
- W2053797609 hasRelatedWork W2035813632 @default.
- W2053797609 hasRelatedWork W2062487702 @default.