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• W2053841492 abstract "The shape of the melt/crystal interface in Czochralski grown silicon crystal is a result of the interaction of several phenomena. In particular, melt convection plays a key role as it affects the heat and mass transfer inside the melt. Depending on the growth conditions and heat transfer in the melt, the interface shape can evolve from a purely concave or convex shape to a W-shape. The aim of this study is to explore the heat transfer conditions and melt flow patterns leading to the formation of W-shape interfaces. The 2D simulations are performed for 6 in. diameter silicon in order to identify conditions leading to W-shape formation. The numerical results show that the formation and development of W-shape interfaces is associated with growth conditions favoring the appearance of a vortex underneath the crystal. This vortex significantly influences the thermal field within the crystallization zone and locally alters the interface deflection. This study suggests that the formation of the W-shape interfaces influences significantly the grown-in defects and crystal quality." @default.
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• W2053841492 date "2013-01-01" @default.
• W2053841492 modified "2023-10-17" @default.
• W2053841492 title "Analysis of W-shape melt/crystal interface formation in Czochralski silicon crystal growth" @default.
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• W2053841492 doi "https://doi.org/10.1016/j.jcrysgro.2011.10.062" @default.
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