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• W2054016779 abstract "We present the results of an extensive characterization of physical and electrostatic effects influencing the dynamical behavior of a micro-electromechanical (MEMS) accelerometer based on commercial technology. A similar device has been utilized recently to demonstrate the effect of Casimir and other nano-scale interactions on the pull-in distance [Ardito et. al., Microelectron. Reliab., 52 (2012) 271]. In the present work, we focus on the influence of pressure, plate separation, and electric surface potentials on the spectral mechanical response. We finally find evidence for the presence of non-viscous damping due to compressibility of the ambient gas, and demonstrate a strong dependence of the sensitivity on the parameters of the operating point." @default.
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• W2054016779 date "2014-01-01" @default.
• W2054016779 modified "2023-09-26" @default.
• W2054016779 title "Investigation of the Effects of Hydrodynamic and Parasitic Electrostatic Forces on the Dynamics of a High Aspect Ratio MEMS Accelerometer" @default.
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• W2054016779 doi "https://doi.org/10.1016/j.proeng.2014.11.279" @default.
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