Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054041887> ?p ?o ?g. }
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with 100 items per page.
- W2054041887 endingPage "544" @default.
- W2054041887 startingPage "542" @default.
- W2054041887 abstract "It is shown that the use of hydrogen-containing gases such as CHF3/H2, CHF3, CH4 /H2, and CH4 /He in reactive ion etching processes leads to a drastic reduction of the concentration of electrically active acceptors in a thin layer at the surface of highly Zn-doped InGaAs. This passivation effect leads to strongly nonlinear current/voltage characteristics of nonalloyed Ti/Pt/Au contacts when applied directly on as-treated p++ -InGaAs layers. The observed deactivation of acceptors is inferred to be caused by hydrogen since no such an effect was found with the use of hydrogen-free etching gases." @default.
- W2054041887 created "2016-06-24" @default.
- W2054041887 creator A5087373952 @default.
- W2054041887 date "1990-02-05" @default.
- W2054041887 modified "2023-10-14" @default.
- W2054041887 title "Hydrogen passivation of Zn acceptors in InGaAs during reactive ion etching" @default.
- W2054041887 cites W1992899357 @default.
- W2054041887 cites W2016350779 @default.
- W2054041887 cites W2034176519 @default.
- W2054041887 cites W2093574781 @default.
- W2054041887 doi "https://doi.org/10.1063/1.102739" @default.
- W2054041887 hasPublicationYear "1990" @default.
- W2054041887 type Work @default.
- W2054041887 sameAs 2054041887 @default.
- W2054041887 citedByCount "25" @default.
- W2054041887 countsByYear W20540418872017 @default.
- W2054041887 crossrefType "journal-article" @default.
- W2054041887 hasAuthorship W2054041887A5087373952 @default.
- W2054041887 hasConcept C100460472 @default.
- W2054041887 hasConcept C113196181 @default.
- W2054041887 hasConcept C121332964 @default.
- W2054041887 hasConcept C130472188 @default.
- W2054041887 hasConcept C145148216 @default.
- W2054041887 hasConcept C171250308 @default.
- W2054041887 hasConcept C178790620 @default.
- W2054041887 hasConcept C179104552 @default.
- W2054041887 hasConcept C185592680 @default.
- W2054041887 hasConcept C192562407 @default.
- W2054041887 hasConcept C26873012 @default.
- W2054041887 hasConcept C2779227376 @default.
- W2054041887 hasConcept C2779892579 @default.
- W2054041887 hasConcept C33574316 @default.
- W2054041887 hasConcept C43617362 @default.
- W2054041887 hasConcept C49040817 @default.
- W2054041887 hasConcept C512968161 @default.
- W2054041887 hasConcept C57863236 @default.
- W2054041887 hasConceptScore W2054041887C100460472 @default.
- W2054041887 hasConceptScore W2054041887C113196181 @default.
- W2054041887 hasConceptScore W2054041887C121332964 @default.
- W2054041887 hasConceptScore W2054041887C130472188 @default.
- W2054041887 hasConceptScore W2054041887C145148216 @default.
- W2054041887 hasConceptScore W2054041887C171250308 @default.
- W2054041887 hasConceptScore W2054041887C178790620 @default.
- W2054041887 hasConceptScore W2054041887C179104552 @default.
- W2054041887 hasConceptScore W2054041887C185592680 @default.
- W2054041887 hasConceptScore W2054041887C192562407 @default.
- W2054041887 hasConceptScore W2054041887C26873012 @default.
- W2054041887 hasConceptScore W2054041887C2779227376 @default.
- W2054041887 hasConceptScore W2054041887C2779892579 @default.
- W2054041887 hasConceptScore W2054041887C33574316 @default.
- W2054041887 hasConceptScore W2054041887C43617362 @default.
- W2054041887 hasConceptScore W2054041887C49040817 @default.
- W2054041887 hasConceptScore W2054041887C512968161 @default.
- W2054041887 hasConceptScore W2054041887C57863236 @default.
- W2054041887 hasIssue "6" @default.
- W2054041887 hasLocation W20540418871 @default.
- W2054041887 hasOpenAccess W2054041887 @default.
- W2054041887 hasPrimaryLocation W20540418871 @default.
- W2054041887 hasRelatedWork W1990146296 @default.
- W2054041887 hasRelatedWork W1992176398 @default.
- W2054041887 hasRelatedWork W2025734336 @default.
- W2054041887 hasRelatedWork W2067053840 @default.
- W2054041887 hasRelatedWork W2073820324 @default.
- W2054041887 hasRelatedWork W2361719143 @default.
- W2054041887 hasRelatedWork W2743194952 @default.
- W2054041887 hasRelatedWork W2806382295 @default.
- W2054041887 hasRelatedWork W1912896571 @default.
- W2054041887 hasRelatedWork W2515272839 @default.
- W2054041887 hasVolume "56" @default.
- W2054041887 isParatext "false" @default.
- W2054041887 isRetracted "false" @default.
- W2054041887 magId "2054041887" @default.
- W2054041887 workType "article" @default.