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- W2054124615 abstract "This work presents a study on the quality factor (Q-factor) of the passively temperature compensated CMOS-MEMS resonators through the collected material/experimental database and finite-element (FEM) simulation. By adapting an anchor-loss-free double-ended tuning fork (DETF) resonator design, the intrinsic material loss is expected to be the major loss mechanism in CMOS-MEMS resonators that limits the maximum Q-factor below 3,400 at the frequency of interest (300 kHz - 3 MHz). The highest Q-factor of 3,029 is measured in a 1.17-MHz DETF resonator, which is in good agreement with the theoretical prediction. Moreover, the increase of Q-factor at high temperature is also observed, which makes the proposed resonator very attractive for oven-controlled CMOS-MEMS oscillator applications." @default.
- W2054124615 created "2016-06-24" @default.
- W2054124615 creator A5075171288 @default.
- W2054124615 creator A5087490634 @default.
- W2054124615 creator A5089136999 @default.
- W2054124615 date "2015-01-01" @default.
- W2054124615 modified "2023-09-24" @default.
- W2054124615 title "Exploring the Q-factor limit of temperature compensated CMOS-MEMS resonators" @default.
- W2054124615 cites W1979613664 @default.
- W2054124615 cites W2019712221 @default.
- W2054124615 cites W2042084930 @default.
- W2054124615 cites W2044761720 @default.
- W2054124615 cites W2079318497 @default.
- W2054124615 cites W2105083462 @default.
- W2054124615 cites W2131954322 @default.
- W2054124615 cites W2132359014 @default.
- W2054124615 cites W2151709552 @default.
- W2054124615 cites W2153582785 @default.
- W2054124615 cites W2172200731 @default.
- W2054124615 doi "https://doi.org/10.1109/memsys.2015.7051093" @default.
- W2054124615 hasPublicationYear "2015" @default.
- W2054124615 type Work @default.
- W2054124615 sameAs 2054124615 @default.
- W2054124615 citedByCount "4" @default.
- W2054124615 countsByYear W20541246152016 @default.
- W2054124615 countsByYear W20541246152019 @default.
- W2054124615 countsByYear W20541246152020 @default.
- W2054124615 countsByYear W20541246152023 @default.
- W2054124615 crossrefType "proceedings-article" @default.
- W2054124615 hasAuthorship W2054124615A5075171288 @default.
- W2054124615 hasAuthorship W2054124615A5087490634 @default.
- W2054124615 hasAuthorship W2054124615A5089136999 @default.
- W2054124615 hasConcept C107677527 @default.
- W2054124615 hasConcept C121332964 @default.
- W2054124615 hasConcept C127413603 @default.
- W2054124615 hasConcept C135628077 @default.
- W2054124615 hasConcept C187725362 @default.
- W2054124615 hasConcept C192562407 @default.
- W2054124615 hasConcept C198394728 @default.
- W2054124615 hasConcept C24326235 @default.
- W2054124615 hasConcept C24890656 @default.
- W2054124615 hasConcept C37977207 @default.
- W2054124615 hasConcept C46362747 @default.
- W2054124615 hasConcept C49040817 @default.
- W2054124615 hasConcept C66938386 @default.
- W2054124615 hasConcept C97126364 @default.
- W2054124615 hasConceptScore W2054124615C107677527 @default.
- W2054124615 hasConceptScore W2054124615C121332964 @default.
- W2054124615 hasConceptScore W2054124615C127413603 @default.
- W2054124615 hasConceptScore W2054124615C135628077 @default.
- W2054124615 hasConceptScore W2054124615C187725362 @default.
- W2054124615 hasConceptScore W2054124615C192562407 @default.
- W2054124615 hasConceptScore W2054124615C198394728 @default.
- W2054124615 hasConceptScore W2054124615C24326235 @default.
- W2054124615 hasConceptScore W2054124615C24890656 @default.
- W2054124615 hasConceptScore W2054124615C37977207 @default.
- W2054124615 hasConceptScore W2054124615C46362747 @default.
- W2054124615 hasConceptScore W2054124615C49040817 @default.
- W2054124615 hasConceptScore W2054124615C66938386 @default.
- W2054124615 hasConceptScore W2054124615C97126364 @default.
- W2054124615 hasLocation W20541246151 @default.
- W2054124615 hasOpenAccess W2054124615 @default.
- W2054124615 hasPrimaryLocation W20541246151 @default.
- W2054124615 hasRelatedWork W1997450548 @default.
- W2054124615 hasRelatedWork W2033023109 @default.
- W2054124615 hasRelatedWork W2052183413 @default.
- W2054124615 hasRelatedWork W2054124615 @default.
- W2054124615 hasRelatedWork W2811155714 @default.
- W2054124615 hasRelatedWork W3091883299 @default.
- W2054124615 hasRelatedWork W3217179084 @default.
- W2054124615 hasRelatedWork W4234617777 @default.
- W2054124615 hasRelatedWork W4239238585 @default.
- W2054124615 hasRelatedWork W4377704402 @default.
- W2054124615 isParatext "false" @default.
- W2054124615 isRetracted "false" @default.
- W2054124615 magId "2054124615" @default.
- W2054124615 workType "article" @default.