FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054143048> ?p ?o ?g. }

• W2054143048 abstract "This work presents a manually assembled three-dimensional (3-D) silicon platform structure that fully houses a microsystem containing sensors and the necessary system electronics including the power supply. The unique design of this platform provides a supporting package in a 3-D form factor, as well as routing capabilities with orthogonal mechanical and electrical connections between the assembled internal sides. An example platform is fabricated to realize an autonomous data-logging inertial measurement unit (IMU). The IMU consists of a programmable microcontroller, Flash memory, a three-axis accelerometer and a three-axis gyroscope. Double-sided polished, 250 μm-thick silicon wafers are processed using standard microfabrication techniques to produce the individual platform pieces. Sensor data, at a rate of 100Hz, is collected via a microcontroller and stored in the on-board Flash memory. Reliable and repeatable inertial data are collected with maximum power consumption of ~16 mW, and the duration of data-logging capability of ~48 hours. It is envisioned that extensions of this 3-D platform, combined with standard microfabrication techniques, will enable the integration of a variety of heterogeneous materials and devices with a form factor that reduces planar footprint and expands 3-D design space. Through-wafer vias can be used to integrate more functionality per surface area by increasing the interconnect density and allowing both the front and backside of the wafers to be populated with either fabricated or mounted devices." @default.
• W2054143048 created "2016-06-24" @default.
• W2054143048 creator A5006660936 @default.
• W2054143048 creator A5007020735 @default.
• W2054143048 creator A5037516012 @default.
• W2054143048 date "2011-10-01" @default.
• W2054143048 modified "2023-09-24" @default.
• W2054143048 title "A microfabricated platform for three-dimensional microsystems" @default.
• W2054143048 cites W1518821526 @default.
• W2054143048 cites W1536710066 @default.
• W2054143048 cites W1591401764 @default.
• W2054143048 cites W1603236207 @default.
• W2054143048 cites W1926846666 @default.
• W2054143048 cites W1960635237 @default.
• W2054143048 cites W1964615065 @default.
• W2054143048 cites W1967868359 @default.
• W2054143048 cites W1980882594 @default.
• W2054143048 cites W1981655363 @default.
• W2054143048 cites W1990233970 @default.
• W2054143048 cites W1992501038 @default.
• W2054143048 cites W1993560704 @default.
• W2054143048 cites W1994813819 @default.
• W2054143048 cites W1995902957 @default.
• W2054143048 cites W2001339199 @default.
• W2054143048 cites W2010724253 @default.
• W2054143048 cites W2028315895 @default.
• W2054143048 cites W2042254472 @default.
• W2054143048 cites W2046213396 @default.
• W2054143048 cites W2051578871 @default.
• W2054143048 cites W2052091634 @default.
• W2054143048 cites W2072455963 @default.
• W2054143048 cites W2090386235 @default.
• W2054143048 cites W2093295256 @default.
• W2054143048 cites W2095336509 @default.
• W2054143048 cites W2105221237 @default.
• W2054143048 cites W2110567180 @default.
• W2054143048 cites W2116057553 @default.
• W2054143048 cites W2116295576 @default.
• W2054143048 cites W2121840937 @default.
• W2054143048 cites W2121890582 @default.
• W2054143048 cites W2125240117 @default.
• W2054143048 cites W2129059244 @default.
• W2054143048 cites W2129109928 @default.
• W2054143048 cites W2136782677 @default.
• W2054143048 cites W2136786253 @default.
• W2054143048 cites W2140578149 @default.
• W2054143048 cites W2145177855 @default.
• W2054143048 cites W2153774608 @default.
• W2054143048 cites W2154691998 @default.
• W2054143048 cites W2156084757 @default.
• W2054143048 cites W2158131228 @default.
• W2054143048 cites W2161138431 @default.
• W2054143048 cites W2032519321 @default.
• W2054143048 doi "https://doi.org/10.1109/icsens.2011.6127170" @default.
• W2054143048 hasPublicationYear "2011" @default.
• W2054143048 type Work @default.
• W2054143048 sameAs 2054143048 @default.
• W2054143048 citedByCount "0" @default.
• W2054143048 crossrefType "proceedings-article" @default.
• W2054143048 hasAuthorship W2054143048A5006660936 @default.
• W2054143048 hasAuthorship W2054143048A5007020735 @default.
• W2054143048 hasAuthorship W2054143048A5037516012 @default.
• W2054143048 hasBestOaLocation W20541430482 @default.
• W2054143048 hasConcept C111919701 @default.
• W2054143048 hasConcept C119599485 @default.
• W2054143048 hasConcept C127413603 @default.
• W2054143048 hasConcept C132943942 @default.
• W2054143048 hasConcept C136525101 @default.
• W2054143048 hasConcept C138331895 @default.
• W2054143048 hasConcept C142724271 @default.
• W2054143048 hasConcept C146978453 @default.
• W2054143048 hasConcept C149635348 @default.
• W2054143048 hasConcept C151054161 @default.
• W2054143048 hasConcept C151730666 @default.
• W2054143048 hasConcept C158488048 @default.
• W2054143048 hasConcept C159234332 @default.
• W2054143048 hasConcept C160671074 @default.
• W2054143048 hasConcept C171250308 @default.
• W2054143048 hasConcept C173018170 @default.
• W2054143048 hasConcept C192562407 @default.
• W2054143048 hasConcept C204787440 @default.
• W2054143048 hasConcept C2776249927 @default.
• W2054143048 hasConcept C2776531357 @default.
• W2054143048 hasConcept C31972630 @default.
• W2054143048 hasConcept C41008148 @default.
• W2054143048 hasConcept C527607 @default.
• W2054143048 hasConcept C71924100 @default.
• W2054143048 hasConcept C77390884 @default.
• W2054143048 hasConcept C79061980 @default.
• W2054143048 hasConcept C86803240 @default.
• W2054143048 hasConcept C9390403 @default.
• W2054143048 hasConceptScore W2054143048C111919701 @default.
• W2054143048 hasConceptScore W2054143048C119599485 @default.
• W2054143048 hasConceptScore W2054143048C127413603 @default.
• W2054143048 hasConceptScore W2054143048C132943942 @default.
• W2054143048 hasConceptScore W2054143048C136525101 @default.
• W2054143048 hasConceptScore W2054143048C138331895 @default.
• W2054143048 hasConceptScore W2054143048C142724271 @default.
• W2054143048 hasConceptScore W2054143048C146978453 @default.
• W2054143048 hasConceptScore W2054143048C149635348 @default.

• next