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- W2054151985 abstract "We measured the near-field photocurrent of the p-n junction on a Si substrate under the reverse-bias condition in order to estimate the dopant concentration of the p-n junction. The full-width at half maximum (FWHM) of the cross-sectional profile of the near-field photocurrent signal varied on changing the applied reverse-biased voltage according to the resulting change in the thickness of the depletion region. From the measured reverse-bias dependence of the FWHM of the cross-sectional profile, the local dopant concentration of the Si substrate was estimated as 3.5±0.4×10 16 cm -3 . This result shows good agreement with the value of dopant concentration (3.1×10 16 cm -3 ) evaluated from the device fabrication conditions." @default.
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- W2054151985 date "2001-03-01" @default.
- W2054151985 modified "2023-10-16" @default.
- W2054151985 title "Near-Field Photocurrent Measurements of Si p-n Junction under the Reverse-Bias Condition" @default.
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- W2054151985 doi "https://doi.org/10.1143/jjap.40.l286" @default.
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