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- W2054162018 abstract "A spiral inductor is integrated into an existing CMOS triple layer backend process. To obtain a high quality factor `Q' for the inductor the existing one micron thick metal 3 process was replaced by a three micron thick metal process. The necessary process modifications to integrate this thicker metal process are presented." @default.
- W2054162018 created "2016-06-24" @default.
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- W2054162018 date "1999-08-11" @default.
- W2054162018 modified "2023-09-23" @default.
- W2054162018 title "Integration of a high-Q spiral inductor into an existing digital CMOS backend" @default.
- W2054162018 doi "https://doi.org/10.1117/12.360572" @default.
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