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- W2054287547 abstract "Thin Si3N4 films of thickness 50–1500 nm were prepared by a low pressure, room temperature chemical vapour deposition process. The dielectric properties of the layers were studied in the frequency range from 10 Hz to 1 MHz and at temperatures between 77 and 400 K. We observed a σ'(ω, T) = A(T)ωs(T) dependence with s⪅1 (where σ' is the real part of the a.c. conductivity). For samples prepared in various ways, A varied between a constant value and a superlinear dependence on temperature. At 77 K, however, σ' for all the samples was found to be approximately the same (about 8 × 10−12 Ω−1 cm−1 at 1 kHz) irrespective of the preparation parameters." @default.
- W2054287547 created "2016-06-24" @default.
- W2054287547 creator A5038982367 @default.
- W2054287547 creator A5062271750 @default.
- W2054287547 date "1982-03-01" @default.
- W2054287547 modified "2023-09-27" @default.
- W2054287547 title "Preparation and dielectric properties of Si3N4 thin films" @default.
- W2054287547 cites W1556177135 @default.
- W2054287547 cites W1988944636 @default.
- W2054287547 cites W2014895364 @default.
- W2054287547 cites W2018783189 @default.
- W2054287547 cites W2053008634 @default.
- W2054287547 cites W2075892989 @default.
- W2054287547 cites W2084736646 @default.
- W2054287547 doi "https://doi.org/10.1016/0040-6090(82)90485-0" @default.
- W2054287547 hasPublicationYear "1982" @default.
- W2054287547 type Work @default.
- W2054287547 sameAs 2054287547 @default.
- W2054287547 citedByCount "12" @default.
- W2054287547 countsByYear W20542875472016 @default.
- W2054287547 crossrefType "journal-article" @default.
- W2054287547 hasAuthorship W2054287547A5038982367 @default.
- W2054287547 hasAuthorship W2054287547A5062271750 @default.
- W2054287547 hasConcept C113196181 @default.
- W2054287547 hasConcept C119599485 @default.
- W2054287547 hasConcept C121332964 @default.
- W2054287547 hasConcept C127413603 @default.
- W2054287547 hasConcept C131540310 @default.
- W2054287547 hasConcept C133386390 @default.
- W2054287547 hasConcept C147789679 @default.
- W2054287547 hasConcept C171250308 @default.
- W2054287547 hasConcept C178790620 @default.
- W2054287547 hasConcept C185592680 @default.
- W2054287547 hasConcept C19067145 @default.
- W2054287547 hasConcept C192562407 @default.
- W2054287547 hasConcept C199289684 @default.
- W2054287547 hasConcept C39353612 @default.
- W2054287547 hasConcept C49040817 @default.
- W2054287547 hasConcept C57410435 @default.
- W2054287547 hasConcept C69990965 @default.
- W2054287547 hasConcept C97355855 @default.
- W2054287547 hasConceptScore W2054287547C113196181 @default.
- W2054287547 hasConceptScore W2054287547C119599485 @default.
- W2054287547 hasConceptScore W2054287547C121332964 @default.
- W2054287547 hasConceptScore W2054287547C127413603 @default.
- W2054287547 hasConceptScore W2054287547C131540310 @default.
- W2054287547 hasConceptScore W2054287547C133386390 @default.
- W2054287547 hasConceptScore W2054287547C147789679 @default.
- W2054287547 hasConceptScore W2054287547C171250308 @default.
- W2054287547 hasConceptScore W2054287547C178790620 @default.
- W2054287547 hasConceptScore W2054287547C185592680 @default.
- W2054287547 hasConceptScore W2054287547C19067145 @default.
- W2054287547 hasConceptScore W2054287547C192562407 @default.
- W2054287547 hasConceptScore W2054287547C199289684 @default.
- W2054287547 hasConceptScore W2054287547C39353612 @default.
- W2054287547 hasConceptScore W2054287547C49040817 @default.
- W2054287547 hasConceptScore W2054287547C57410435 @default.
- W2054287547 hasConceptScore W2054287547C69990965 @default.
- W2054287547 hasConceptScore W2054287547C97355855 @default.
- W2054287547 hasLocation W20542875471 @default.
- W2054287547 hasOpenAccess W2054287547 @default.
- W2054287547 hasPrimaryLocation W20542875471 @default.
- W2054287547 hasRelatedWork W1511339173 @default.
- W2054287547 hasRelatedWork W1965495267 @default.
- W2054287547 hasRelatedWork W1971656001 @default.
- W2054287547 hasRelatedWork W1977689356 @default.
- W2054287547 hasRelatedWork W1995605911 @default.
- W2054287547 hasRelatedWork W2003102588 @default.
- W2054287547 hasRelatedWork W2025038819 @default.
- W2054287547 hasRelatedWork W2034535806 @default.
- W2054287547 hasRelatedWork W2035753655 @default.
- W2054287547 hasRelatedWork W2068497931 @default.
- W2054287547 hasRelatedWork W2074930796 @default.
- W2054287547 hasRelatedWork W2076706191 @default.
- W2054287547 hasRelatedWork W2078901323 @default.
- W2054287547 hasRelatedWork W2084280838 @default.
- W2054287547 hasRelatedWork W2090368863 @default.
- W2054287547 hasRelatedWork W2152764694 @default.
- W2054287547 hasRelatedWork W2182484087 @default.
- W2054287547 hasRelatedWork W3008956704 @default.
- W2054287547 hasRelatedWork W3011702552 @default.
- W2054287547 hasRelatedWork W2499108286 @default.
- W2054287547 isParatext "false" @default.
- W2054287547 isRetracted "false" @default.
- W2054287547 magId "2054287547" @default.
- W2054287547 workType "article" @default.