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- W2054297910 abstract "We propose a quantification method in laser-ionization sputtered neutral mass spectrometry with a large acceptance volume to detect photoionized neutrals (photoions). The dependence of photoion intensity on laser power, up to the above-saturation region where the volume effect occurs, is sufficiently explained by considering spatial distributions of sputtered neutrals' and photon fluxes. In nonresonant multiphoton ionization of sputtered species ejected from GaAs(111) by a focused KrF excimer laser beam, the ionization cross-sections of Ga and As atoms were estimated by the simple formulae from the measured curves of photoion intensity vs laser pulse energy. The composition ratio of the GaAs crystal was reproduced by the quantification method from the measured photoion intensity ratio of Ga to As at each laser pulse energy below and above saturation." @default.
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- W2054297910 date "1997-10-01" @default.
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- W2054297910 title "A quantification method in laser-ionization sputtered neutral mass spectrometry with a large acceptance volume of photoion detection" @default.
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- W2054297910 doi "https://doi.org/10.1016/s0168-1176(97)00093-1" @default.
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