Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054354733> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2054354733 endingPage "302" @default.
- W2054354733 startingPage "293" @default.
- W2054354733 abstract "Thin films of SnOx, GeO2, mixed GexSnyOz, and In2O3 have been deposited by plasma-enhanced chemical vapour deposition (PECVD) of the methyl compounds Sn(CH3)4, Ge(CH3)4 and In(CH3)3. Indium oxide films have also been prepared from In(thd)3 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) by PECVD." @default.
- W2054354733 created "2016-06-24" @default.
- W2054354733 creator A5018699090 @default.
- W2054354733 creator A5048223314 @default.
- W2054354733 creator A5076094782 @default.
- W2054354733 date "1990-08-01" @default.
- W2054354733 modified "2023-09-26" @default.
- W2054354733 title "Plasma-enhanced chemical vapour deposition of thin GeO2, SnOx, GeO2SnOx, and In2O3 films" @default.
- W2054354733 cites W1782859878 @default.
- W2054354733 cites W1870477549 @default.
- W2054354733 cites W1964403038 @default.
- W2054354733 cites W1967916150 @default.
- W2054354733 cites W1974802708 @default.
- W2054354733 cites W1978418622 @default.
- W2054354733 cites W1980091949 @default.
- W2054354733 cites W1981117198 @default.
- W2054354733 cites W2015387696 @default.
- W2054354733 cites W2019365089 @default.
- W2054354733 cites W2033718614 @default.
- W2054354733 cites W2033744788 @default.
- W2054354733 cites W2043969372 @default.
- W2054354733 cites W2049883780 @default.
- W2054354733 cites W2070023439 @default.
- W2054354733 cites W2074034175 @default.
- W2054354733 cites W2133162742 @default.
- W2054354733 cites W2144871195 @default.
- W2054354733 cites W3049683281 @default.
- W2054354733 doi "https://doi.org/10.1016/0040-6090(90)90458-p" @default.
- W2054354733 hasPublicationYear "1990" @default.
- W2054354733 type Work @default.
- W2054354733 sameAs 2054354733 @default.
- W2054354733 citedByCount "21" @default.
- W2054354733 countsByYear W20543547332012 @default.
- W2054354733 countsByYear W20543547332013 @default.
- W2054354733 countsByYear W20543547332014 @default.
- W2054354733 countsByYear W20543547332017 @default.
- W2054354733 crossrefType "journal-article" @default.
- W2054354733 hasAuthorship W2054354733A5018699090 @default.
- W2054354733 hasAuthorship W2054354733A5048223314 @default.
- W2054354733 hasAuthorship W2054354733A5076094782 @default.
- W2054354733 hasConcept C107872376 @default.
- W2054354733 hasConcept C113196181 @default.
- W2054354733 hasConcept C127413603 @default.
- W2054354733 hasConcept C151730666 @default.
- W2054354733 hasConcept C171250308 @default.
- W2054354733 hasConcept C179104552 @default.
- W2054354733 hasConcept C185592680 @default.
- W2054354733 hasConcept C19067145 @default.
- W2054354733 hasConcept C191897082 @default.
- W2054354733 hasConcept C192562407 @default.
- W2054354733 hasConcept C2779851234 @default.
- W2054354733 hasConcept C2816523 @default.
- W2054354733 hasConcept C38347018 @default.
- W2054354733 hasConcept C42360764 @default.
- W2054354733 hasConcept C49040817 @default.
- W2054354733 hasConcept C543292547 @default.
- W2054354733 hasConcept C57410435 @default.
- W2054354733 hasConcept C64297162 @default.
- W2054354733 hasConcept C86803240 @default.
- W2054354733 hasConceptScore W2054354733C107872376 @default.
- W2054354733 hasConceptScore W2054354733C113196181 @default.
- W2054354733 hasConceptScore W2054354733C127413603 @default.
- W2054354733 hasConceptScore W2054354733C151730666 @default.
- W2054354733 hasConceptScore W2054354733C171250308 @default.
- W2054354733 hasConceptScore W2054354733C179104552 @default.
- W2054354733 hasConceptScore W2054354733C185592680 @default.
- W2054354733 hasConceptScore W2054354733C19067145 @default.
- W2054354733 hasConceptScore W2054354733C191897082 @default.
- W2054354733 hasConceptScore W2054354733C192562407 @default.
- W2054354733 hasConceptScore W2054354733C2779851234 @default.
- W2054354733 hasConceptScore W2054354733C2816523 @default.
- W2054354733 hasConceptScore W2054354733C38347018 @default.
- W2054354733 hasConceptScore W2054354733C42360764 @default.
- W2054354733 hasConceptScore W2054354733C49040817 @default.
- W2054354733 hasConceptScore W2054354733C543292547 @default.
- W2054354733 hasConceptScore W2054354733C57410435 @default.
- W2054354733 hasConceptScore W2054354733C64297162 @default.
- W2054354733 hasConceptScore W2054354733C86803240 @default.
- W2054354733 hasIssue "2" @default.
- W2054354733 hasLocation W20543547331 @default.
- W2054354733 hasOpenAccess W2054354733 @default.
- W2054354733 hasPrimaryLocation W20543547331 @default.
- W2054354733 hasRelatedWork W1503002209 @default.
- W2054354733 hasRelatedWork W1965997535 @default.
- W2054354733 hasRelatedWork W2030824697 @default.
- W2054354733 hasRelatedWork W2070246554 @default.
- W2054354733 hasRelatedWork W2165940550 @default.
- W2054354733 hasRelatedWork W2357145983 @default.
- W2054354733 hasRelatedWork W2379688728 @default.
- W2054354733 hasRelatedWork W778132138 @default.
- W2054354733 hasRelatedWork W781383086 @default.
- W2054354733 hasRelatedWork W2152946510 @default.
- W2054354733 hasVolume "189" @default.
- W2054354733 isParatext "false" @default.
- W2054354733 isRetracted "false" @default.
- W2054354733 magId "2054354733" @default.
- W2054354733 workType "article" @default.