Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054376052> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2054376052 endingPage "055403" @default.
- W2054376052 startingPage "055403" @default.
- W2054376052 abstract "The strain state of metal oxides Pr 2 O 3 , Y 2 O 3 and Sc 2 O 3 used as buffer material in different heteroepitaxially grown semiconductor-oxide-Si(1 1 1) layer stacks was studied by x-ray diffraction techniques at room temperature (RT) and near the growth temperature of 625 °C. A broad spectrum of different strain states was found depending on preparation conditions, layer combination and layer thickness. Pr 2 O 3 behaves differently from the other two investigated oxides as it grows in a hexagonal phase on Si(1 1 1) and must be transformed into the stable cubic phase by annealing processes. This transformation is accompanied by the creation of an amorphous silicate interface layer that leads to a decoupling of substrate and oxide lattices and finally to a partial relaxation of the cub-Pr 2 O 3 layer only. High-temperature measurements demonstrate that there exists a measurable difference between the strain state at RT, where x-ray measurements are typically performed, and at growth temperature. The coefficient of thermal expansion of different metal oxides was measured in thin film structures for the first time. These coefficients are significantly higher compared with that of Si, which leads to an additional tensile strain component when the samples are cooled down to RT." @default.
- W2054376052 created "2016-06-24" @default.
- W2054376052 creator A5061582608 @default.
- W2054376052 creator A5075626502 @default.
- W2054376052 date "2011-01-17" @default.
- W2054376052 modified "2023-09-27" @default.
- W2054376052 title "About the strain state of different metal oxide layers epitaxially grown on Si(1 1 1)" @default.
- W2054376052 cites W1494087470 @default.
- W2054376052 cites W1549528852 @default.
- W2054376052 cites W1615697684 @default.
- W2054376052 cites W1654823337 @default.
- W2054376052 cites W1665816043 @default.
- W2054376052 cites W1974065117 @default.
- W2054376052 cites W1975441858 @default.
- W2054376052 cites W1979059100 @default.
- W2054376052 cites W1999843180 @default.
- W2054376052 cites W2007760934 @default.
- W2054376052 cites W2007788059 @default.
- W2054376052 cites W2012662936 @default.
- W2054376052 cites W2024785986 @default.
- W2054376052 cites W2043212100 @default.
- W2054376052 cites W2044795334 @default.
- W2054376052 cites W2047121846 @default.
- W2054376052 cites W2048847700 @default.
- W2054376052 cites W2069521960 @default.
- W2054376052 cites W2071892759 @default.
- W2054376052 cites W2092600841 @default.
- W2054376052 cites W2094511199 @default.
- W2054376052 cites W2141702625 @default.
- W2054376052 cites W2144541568 @default.
- W2054376052 cites W2160688653 @default.
- W2054376052 cites W49822679 @default.
- W2054376052 doi "https://doi.org/10.1088/0022-3727/44/5/055403" @default.
- W2054376052 hasPublicationYear "2011" @default.
- W2054376052 type Work @default.
- W2054376052 sameAs 2054376052 @default.
- W2054376052 citedByCount "12" @default.
- W2054376052 countsByYear W20543760522012 @default.
- W2054376052 countsByYear W20543760522013 @default.
- W2054376052 countsByYear W20543760522015 @default.
- W2054376052 countsByYear W20543760522016 @default.
- W2054376052 countsByYear W20543760522017 @default.
- W2054376052 countsByYear W20543760522018 @default.
- W2054376052 crossrefType "journal-article" @default.
- W2054376052 hasAuthorship W2054376052A5061582608 @default.
- W2054376052 hasAuthorship W2054376052A5075626502 @default.
- W2054376052 hasConcept C110738630 @default.
- W2054376052 hasConcept C113196181 @default.
- W2054376052 hasConcept C159985019 @default.
- W2054376052 hasConcept C185592680 @default.
- W2054376052 hasConcept C191897082 @default.
- W2054376052 hasConcept C192562407 @default.
- W2054376052 hasConcept C2777855556 @default.
- W2054376052 hasConcept C2779227376 @default.
- W2054376052 hasConcept C2779851234 @default.
- W2054376052 hasConcept C43617362 @default.
- W2054376052 hasConcept C47463417 @default.
- W2054376052 hasConcept C544153396 @default.
- W2054376052 hasConcept C56052488 @default.
- W2054376052 hasConcept C8010536 @default.
- W2054376052 hasConceptScore W2054376052C110738630 @default.
- W2054376052 hasConceptScore W2054376052C113196181 @default.
- W2054376052 hasConceptScore W2054376052C159985019 @default.
- W2054376052 hasConceptScore W2054376052C185592680 @default.
- W2054376052 hasConceptScore W2054376052C191897082 @default.
- W2054376052 hasConceptScore W2054376052C192562407 @default.
- W2054376052 hasConceptScore W2054376052C2777855556 @default.
- W2054376052 hasConceptScore W2054376052C2779227376 @default.
- W2054376052 hasConceptScore W2054376052C2779851234 @default.
- W2054376052 hasConceptScore W2054376052C43617362 @default.
- W2054376052 hasConceptScore W2054376052C47463417 @default.
- W2054376052 hasConceptScore W2054376052C544153396 @default.
- W2054376052 hasConceptScore W2054376052C56052488 @default.
- W2054376052 hasConceptScore W2054376052C8010536 @default.
- W2054376052 hasIssue "5" @default.
- W2054376052 hasLocation W20543760521 @default.
- W2054376052 hasOpenAccess W2054376052 @default.
- W2054376052 hasPrimaryLocation W20543760521 @default.
- W2054376052 hasRelatedWork W1977366314 @default.
- W2054376052 hasRelatedWork W1980561966 @default.
- W2054376052 hasRelatedWork W1983835849 @default.
- W2054376052 hasRelatedWork W2026116228 @default.
- W2054376052 hasRelatedWork W2032643698 @default.
- W2054376052 hasRelatedWork W2039498448 @default.
- W2054376052 hasRelatedWork W2091835221 @default.
- W2054376052 hasRelatedWork W2095302020 @default.
- W2054376052 hasRelatedWork W2129506634 @default.
- W2054376052 hasRelatedWork W2490787985 @default.
- W2054376052 hasVolume "44" @default.
- W2054376052 isParatext "false" @default.
- W2054376052 isRetracted "false" @default.
- W2054376052 magId "2054376052" @default.
- W2054376052 workType "article" @default.