Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054412445> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2054412445 endingPage "1570" @default.
- W2054412445 startingPage "1561" @default.
- W2054412445 abstract "Abstract In this paper, the applicability of an ultra-high vacuum (UHV) contactless capacitance-voltage ( C-V ) measurement method is evaluated for use in non-destructive characterization of crystal growth and device processing steps for the compound semiconductor heterostructure microelectronics. The UHV gap length between the sample surface and the field plate was made by an optical measurement using the Goos–Haenchen effect, and its accuracy was discussed by a theoretical calculation. Then, zero-bias position of the surface Fermi level, conduction type and doping were successfully determined on free surfaces of GaAs and InP by basic C-V measurements. Finally, the technique was applied to characterize each step of the UHV-based surface passivation process for InP utilizing the Si interface control layer (Si ICL). Change of the surface state distribution after each step was successfully detected without breaking UHV, demonstrating the powerful capability of the method." @default.
- W2054412445 created "2016-06-24" @default.
- W2054412445 creator A5011556710 @default.
- W2054412445 creator A5018392176 @default.
- W2054412445 creator A5019326559 @default.
- W2054412445 creator A5028934181 @default.
- W2054412445 creator A5082452145 @default.
- W2054412445 date "1999-08-01" @default.
- W2054412445 modified "2023-10-02" @default.
- W2054412445 title "In-situ characterization technique of compound semiconductor heterostructure growth and device processing steps based on UHV contactless capacitance-voltage measurement" @default.
- W2054412445 cites W1980061358 @default.
- W2054412445 cites W2008209189 @default.
- W2054412445 cites W2008545021 @default.
- W2054412445 cites W2022392344 @default.
- W2054412445 cites W2027144434 @default.
- W2054412445 cites W2027225132 @default.
- W2054412445 cites W2040213180 @default.
- W2054412445 cites W2090998486 @default.
- W2054412445 cites W2339136047 @default.
- W2054412445 doi "https://doi.org/10.1016/s0038-1101(99)00104-5" @default.
- W2054412445 hasPublicationYear "1999" @default.
- W2054412445 type Work @default.
- W2054412445 sameAs 2054412445 @default.
- W2054412445 citedByCount "19" @default.
- W2054412445 countsByYear W20544124452012 @default.
- W2054412445 countsByYear W20544124452016 @default.
- W2054412445 crossrefType "journal-article" @default.
- W2054412445 hasAuthorship W2054412445A5011556710 @default.
- W2054412445 hasAuthorship W2054412445A5018392176 @default.
- W2054412445 hasAuthorship W2054412445A5019326559 @default.
- W2054412445 hasAuthorship W2054412445A5028934181 @default.
- W2054412445 hasAuthorship W2054412445A5082452145 @default.
- W2054412445 hasConcept C108225325 @default.
- W2054412445 hasConcept C110738630 @default.
- W2054412445 hasConcept C119599485 @default.
- W2054412445 hasConcept C127413603 @default.
- W2054412445 hasConcept C147789679 @default.
- W2054412445 hasConcept C165801399 @default.
- W2054412445 hasConcept C171250308 @default.
- W2054412445 hasConcept C17525397 @default.
- W2054412445 hasConcept C178790620 @default.
- W2054412445 hasConcept C185592680 @default.
- W2054412445 hasConcept C192562407 @default.
- W2054412445 hasConcept C24326235 @default.
- W2054412445 hasConcept C2777822432 @default.
- W2054412445 hasConcept C2779227376 @default.
- W2054412445 hasConcept C2780841128 @default.
- W2054412445 hasConcept C30066665 @default.
- W2054412445 hasConcept C49040817 @default.
- W2054412445 hasConcept C79794668 @default.
- W2054412445 hasConcept C86537342 @default.
- W2054412445 hasConceptScore W2054412445C108225325 @default.
- W2054412445 hasConceptScore W2054412445C110738630 @default.
- W2054412445 hasConceptScore W2054412445C119599485 @default.
- W2054412445 hasConceptScore W2054412445C127413603 @default.
- W2054412445 hasConceptScore W2054412445C147789679 @default.
- W2054412445 hasConceptScore W2054412445C165801399 @default.
- W2054412445 hasConceptScore W2054412445C171250308 @default.
- W2054412445 hasConceptScore W2054412445C17525397 @default.
- W2054412445 hasConceptScore W2054412445C178790620 @default.
- W2054412445 hasConceptScore W2054412445C185592680 @default.
- W2054412445 hasConceptScore W2054412445C192562407 @default.
- W2054412445 hasConceptScore W2054412445C24326235 @default.
- W2054412445 hasConceptScore W2054412445C2777822432 @default.
- W2054412445 hasConceptScore W2054412445C2779227376 @default.
- W2054412445 hasConceptScore W2054412445C2780841128 @default.
- W2054412445 hasConceptScore W2054412445C30066665 @default.
- W2054412445 hasConceptScore W2054412445C49040817 @default.
- W2054412445 hasConceptScore W2054412445C79794668 @default.
- W2054412445 hasConceptScore W2054412445C86537342 @default.
- W2054412445 hasIssue "8" @default.
- W2054412445 hasLocation W20544124451 @default.
- W2054412445 hasOpenAccess W2054412445 @default.
- W2054412445 hasPrimaryLocation W20544124451 @default.
- W2054412445 hasRelatedWork W1667218544 @default.
- W2054412445 hasRelatedWork W1873424180 @default.
- W2054412445 hasRelatedWork W1991032759 @default.
- W2054412445 hasRelatedWork W2009042822 @default.
- W2054412445 hasRelatedWork W2058676402 @default.
- W2054412445 hasRelatedWork W2132585519 @default.
- W2054412445 hasRelatedWork W2614960126 @default.
- W2054412445 hasRelatedWork W2949922465 @default.
- W2054412445 hasRelatedWork W3193816322 @default.
- W2054412445 hasRelatedWork W4298346902 @default.
- W2054412445 hasVolume "43" @default.
- W2054412445 isParatext "false" @default.
- W2054412445 isRetracted "false" @default.
- W2054412445 magId "2054412445" @default.
- W2054412445 workType "article" @default.