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- W2054536735 endingPage "6903" @default.
- W2054536735 startingPage "6899" @default.
- W2054536735 abstract "LaAlO3 films were prepared on Si (100) substrates by an electron cyclotron resonance (ECR)-sputtering method, with the aim of using these films as an insulator layer in the metal-ferroelectric-[metal-]insulator-semiconductor (MF[M]IS) structure. In the characterization of the films, particular attention was paid to the comparison with Al2O3 with the same equivalent oxide thickness (EOT). It was found that electrical properties such as maximum induced charge density, long-term reliability, time-dependent dielectric breakdown, and so on were superior in LaAlO3 than in Al2O3 with the same EOT. It was also found that LaAlO3 had better oxidation resistance characteristics by a factor of six than SiO2 at 800°C. Next, MFMIS diodes composed of SrBi2Ta2O9 and LaAlO3 were fabricated and good memory characteristics were obtained when the ratio of the MFM capacitor to the MIS capacitor was 12." @default.
- W2054536735 created "2016-06-24" @default.
- W2054536735 creator A5046750213 @default.
- W2054536735 creator A5089143907 @default.
- W2054536735 date "2002-11-30" @default.
- W2054536735 modified "2023-09-26" @default.
- W2054536735 title "Characteristics of LaAlO3as Insulating Buffer Layers of Ferroelectric-Gate Field Effect Transistors" @default.
- W2054536735 cites W1501087379 @default.
- W2054536735 cites W1963751750 @default.
- W2054536735 cites W1964623783 @default.
- W2054536735 doi "https://doi.org/10.1143/jjap.41.6899" @default.
- W2054536735 hasPublicationYear "2002" @default.
- W2054536735 type Work @default.
- W2054536735 sameAs 2054536735 @default.
- W2054536735 citedByCount "8" @default.
- W2054536735 countsByYear W20545367352018 @default.
- W2054536735 countsByYear W20545367352019 @default.
- W2054536735 countsByYear W20545367352023 @default.
- W2054536735 crossrefType "journal-article" @default.
- W2054536735 hasAuthorship W2054536735A5046750213 @default.
- W2054536735 hasAuthorship W2054536735A5089143907 @default.
- W2054536735 hasConcept C119599485 @default.
- W2054536735 hasConcept C127413603 @default.
- W2054536735 hasConcept C133386390 @default.
- W2054536735 hasConcept C145018004 @default.
- W2054536735 hasConcept C145598152 @default.
- W2054536735 hasConcept C165801399 @default.
- W2054536735 hasConcept C172385210 @default.
- W2054536735 hasConcept C189366214 @default.
- W2054536735 hasConcept C192562407 @default.
- W2054536735 hasConcept C49040817 @default.
- W2054536735 hasConcept C79090758 @default.
- W2054536735 hasConceptScore W2054536735C119599485 @default.
- W2054536735 hasConceptScore W2054536735C127413603 @default.
- W2054536735 hasConceptScore W2054536735C133386390 @default.
- W2054536735 hasConceptScore W2054536735C145018004 @default.
- W2054536735 hasConceptScore W2054536735C145598152 @default.
- W2054536735 hasConceptScore W2054536735C165801399 @default.
- W2054536735 hasConceptScore W2054536735C172385210 @default.
- W2054536735 hasConceptScore W2054536735C189366214 @default.
- W2054536735 hasConceptScore W2054536735C192562407 @default.
- W2054536735 hasConceptScore W2054536735C49040817 @default.
- W2054536735 hasConceptScore W2054536735C79090758 @default.
- W2054536735 hasIssue "Part 1, No. 11B" @default.
- W2054536735 hasLocation W20545367351 @default.
- W2054536735 hasOpenAccess W2054536735 @default.
- W2054536735 hasPrimaryLocation W20545367351 @default.
- W2054536735 hasRelatedWork W1568111433 @default.
- W2054536735 hasRelatedWork W1970831277 @default.
- W2054536735 hasRelatedWork W1983659288 @default.
- W2054536735 hasRelatedWork W2022834994 @default.
- W2054536735 hasRelatedWork W2039595689 @default.
- W2054536735 hasRelatedWork W2056033991 @default.
- W2054536735 hasRelatedWork W2126861694 @default.
- W2054536735 hasRelatedWork W2131277227 @default.
- W2054536735 hasRelatedWork W2355185600 @default.
- W2054536735 hasRelatedWork W2616023779 @default.
- W2054536735 hasVolume "41" @default.
- W2054536735 isParatext "false" @default.
- W2054536735 isRetracted "false" @default.
- W2054536735 magId "2054536735" @default.
- W2054536735 workType "article" @default.