FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054623837> ?p ?o ?g. }

• W2054623837 endingPage "L147" @default.
• W2054623837 startingPage "L144" @default.
• W2054623837 abstract "We have developed a method of microscopically analyzing the degradation of gate SiO2 films in actual metal-oxide-semiconductor (MOS) devices by conductive atomic force microscopy (C-AFM). In C-AFM images of electrically stressed SiO2 films, leakage current spots on a nanometer scale were successfully observed. The observed current spots show characteristic behaviors similar to the transient stress-induced leakage current which can be detected by macroscopic electrical measurements using MOS capacitors. The appearance of the current spots is discussed on the basis of the mechanism by which holes are trapped and detrapped by stress-induced defects in SiO2 films." @default.
• W2054623837 created "2016-06-24" @default.
• W2054623837 creator A5020520694 @default.
• W2054623837 creator A5022098322 @default.
• W2054623837 creator A5024536740 @default.
• W2054623837 creator A5031525846 @default.
• W2054623837 creator A5047252063 @default.
• W2054623837 creator A5090421249 @default.
• W2054623837 date "2004-01-09" @default.
• W2054623837 modified "2023-10-18" @default.
• W2054623837 title "Microscopic Analysis of Stress-Induced Leakage Current in Stressed Gate SiO2Films Using Conductive Atomic Force Microscopy" @default.
• W2054623837 cites W1963645348 @default.
• W2054623837 cites W2073421185 @default.
• W2054623837 cites W2092346700 @default.
• W2054623837 doi "https://doi.org/10.1143/jjap.43.l144" @default.
• W2054623837 hasPublicationYear "2004" @default.
• W2054623837 type Work @default.
• W2054623837 sameAs 2054623837 @default.
• W2054623837 citedByCount "5" @default.
• W2054623837 crossrefType "journal-article" @default.
• W2054623837 hasAuthorship W2054623837A5020520694 @default.
• W2054623837 hasAuthorship W2054623837A5022098322 @default.
• W2054623837 hasAuthorship W2054623837A5024536740 @default.
• W2054623837 hasAuthorship W2054623837A5031525846 @default.
• W2054623837 hasAuthorship W2054623837A5047252063 @default.
• W2054623837 hasAuthorship W2054623837A5090421249 @default.
• W2054623837 hasConcept C102951782 @default.
• W2054623837 hasConcept C108225325 @default.
• W2054623837 hasConcept C119599485 @default.
• W2054623837 hasConcept C120665830 @default.
• W2054623837 hasConcept C121332964 @default.
• W2054623837 hasConcept C127413603 @default.
• W2054623837 hasConcept C138885662 @default.
• W2054623837 hasConcept C139719470 @default.
• W2054623837 hasConcept C147080431 @default.
• W2054623837 hasConcept C148043351 @default.
• W2054623837 hasConcept C159985019 @default.
• W2054623837 hasConcept C162324750 @default.
• W2054623837 hasConcept C165801399 @default.
• W2054623837 hasConcept C171250308 @default.
• W2054623837 hasConcept C172385210 @default.
• W2054623837 hasConcept C191897082 @default.
• W2054623837 hasConcept C192562407 @default.
• W2054623837 hasConcept C202374169 @default.
• W2054623837 hasConcept C206008964 @default.
• W2054623837 hasConcept C21036866 @default.
• W2054623837 hasConcept C2361726 @default.
• W2054623837 hasConcept C2777042071 @default.
• W2054623837 hasConcept C2779851234 @default.
• W2054623837 hasConcept C41895202 @default.
• W2054623837 hasConcept C49040817 @default.
• W2054623837 hasConcept C52192207 @default.
• W2054623837 hasConcept C77066764 @default.
• W2054623837 hasConceptScore W2054623837C102951782 @default.
• W2054623837 hasConceptScore W2054623837C108225325 @default.
• W2054623837 hasConceptScore W2054623837C119599485 @default.
• W2054623837 hasConceptScore W2054623837C120665830 @default.
• W2054623837 hasConceptScore W2054623837C121332964 @default.
• W2054623837 hasConceptScore W2054623837C127413603 @default.
• W2054623837 hasConceptScore W2054623837C138885662 @default.
• W2054623837 hasConceptScore W2054623837C139719470 @default.
• W2054623837 hasConceptScore W2054623837C147080431 @default.
• W2054623837 hasConceptScore W2054623837C148043351 @default.
• W2054623837 hasConceptScore W2054623837C159985019 @default.
• W2054623837 hasConceptScore W2054623837C162324750 @default.
• W2054623837 hasConceptScore W2054623837C165801399 @default.
• W2054623837 hasConceptScore W2054623837C171250308 @default.
• W2054623837 hasConceptScore W2054623837C172385210 @default.
• W2054623837 hasConceptScore W2054623837C191897082 @default.
• W2054623837 hasConceptScore W2054623837C192562407 @default.
• W2054623837 hasConceptScore W2054623837C202374169 @default.
• W2054623837 hasConceptScore W2054623837C206008964 @default.
• W2054623837 hasConceptScore W2054623837C21036866 @default.
• W2054623837 hasConceptScore W2054623837C2361726 @default.
• W2054623837 hasConceptScore W2054623837C2777042071 @default.
• W2054623837 hasConceptScore W2054623837C2779851234 @default.
• W2054623837 hasConceptScore W2054623837C41895202 @default.
• W2054623837 hasConceptScore W2054623837C49040817 @default.
• W2054623837 hasConceptScore W2054623837C52192207 @default.
• W2054623837 hasConceptScore W2054623837C77066764 @default.
• W2054623837 hasIssue "No. 2A" @default.
• W2054623837 hasLocation W20546238371 @default.
• W2054623837 hasOpenAccess W2054623837 @default.
• W2054623837 hasPrimaryLocation W20546238371 @default.
• W2054623837 hasRelatedWork W1998574543 @default.
• W2054623837 hasRelatedWork W2003553884 @default.
• W2054623837 hasRelatedWork W2012665303 @default.
• W2054623837 hasRelatedWork W2046262202 @default.
• W2054623837 hasRelatedWork W2091683697 @default.
• W2054623837 hasRelatedWork W2135926673 @default.
• W2054623837 hasRelatedWork W2143939566 @default.
• W2054623837 hasRelatedWork W2149203134 @default.
• W2054623837 hasRelatedWork W2177339977 @default.
• W2054623837 hasRelatedWork W2974178045 @default.
• W2054623837 hasVolume "43" @default.
• W2054623837 isParatext "false" @default.
• W2054623837 isRetracted "false" @default.
• W2054623837 magId "2054623837" @default.

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