FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2054698567> ?p ?o ?g. }

• W2054698567 endingPage "2491" @default.
• W2054698567 startingPage "2485" @default.
• W2054698567 abstract "Plasma etching of silicon is one of the important etching processes used in modern integrated circuit manufacturing and micro-electro-mechanical systems fabrication. A good understanding of this process leads to better models which are the key to easier and less costly plasma etching process design. The main focus of this paper is on the simulation of the ion reflection from feature sidewalls and the resulting microtrenches. Pure Cl2 plasma was used for experiments because of the simple chemistry. SPEEDIE (Stanford etching and deposition profile simulator) was used in this work. Langmuir adsorption model was used for etching kinetics. Self-consistent calculations were done for fluxes using surface coverage dependent sticking probabilities. For ion reflection, it was assumed that the reflected ions come off with a distribution about the specular reflection angle. This distribution is modeled as cosnθ (θ is the deviation from the specular angle) and is important in getting the correct shape for microtrenches in simulations. A three-dimensional (3D) calculation of the reflection flux was done taking into account the 3D angular distribution of the incoming ions. The ion reflection efficiency was deducted from the silicon ion enhanced etching yield versus ion angle of incidence data. The simulation results match the experimental profiles fairly well." @default.
• W2054698567 created "2016-06-24" @default.
• W2054698567 creator A5016067541 @default.
• W2054698567 creator A5021627904 @default.
• W2054698567 creator A5065754731 @default.
• W2054698567 creator A5077943529 @default.
• W2054698567 creator A5089356893 @default.
• W2054698567 date "1999-09-01" @default.
• W2054698567 modified "2023-10-06" @default.
• W2054698567 title "Analytical modeling of silicon etch process in high density plasma" @default.
• W2054698567 cites W1968087053 @default.
• W2054698567 cites W1969575213 @default.
• W2054698567 cites W1976854299 @default.
• W2054698567 cites W1980234811 @default.
• W2054698567 cites W2012398449 @default.
• W2054698567 cites W2022517492 @default.
• W2054698567 cites W2042936325 @default.
• W2054698567 cites W2054860018 @default.
• W2054698567 cites W2061308467 @default.
• W2054698567 cites W2064167001 @default.
• W2054698567 cites W2083877606 @default.
• W2054698567 doi "https://doi.org/10.1116/1.581986" @default.
• W2054698567 hasPublicationYear "1999" @default.
• W2054698567 type Work @default.
• W2054698567 sameAs 2054698567 @default.
• W2054698567 citedByCount "38" @default.
• W2054698567 countsByYear W20546985672013 @default.
• W2054698567 countsByYear W20546985672015 @default.
• W2054698567 countsByYear W20546985672016 @default.
• W2054698567 countsByYear W20546985672018 @default.
• W2054698567 countsByYear W20546985672019 @default.
• W2054698567 countsByYear W20546985672020 @default.
• W2054698567 countsByYear W20546985672022 @default.
• W2054698567 countsByYear W20546985672023 @default.
• W2054698567 crossrefType "journal-article" @default.
• W2054698567 hasAuthorship W2054698567A5016067541 @default.
• W2054698567 hasAuthorship W2054698567A5021627904 @default.
• W2054698567 hasAuthorship W2054698567A5065754731 @default.
• W2054698567 hasAuthorship W2054698567A5077943529 @default.
• W2054698567 hasAuthorship W2054698567A5089356893 @default.
• W2054698567 hasConcept C100460472 @default.
• W2054698567 hasConcept C107187091 @default.
• W2054698567 hasConcept C118381688 @default.
• W2054698567 hasConcept C120665830 @default.
• W2054698567 hasConcept C121332964 @default.
• W2054698567 hasConcept C124634506 @default.
• W2054698567 hasConcept C130472188 @default.
• W2054698567 hasConcept C136525101 @default.
• W2054698567 hasConcept C142724271 @default.
• W2054698567 hasConcept C145148216 @default.
• W2054698567 hasConcept C171250308 @default.
• W2054698567 hasConcept C178790620 @default.
• W2054698567 hasConcept C185592680 @default.
• W2054698567 hasConcept C192562407 @default.
• W2054698567 hasConcept C199360897 @default.
• W2054698567 hasConcept C204787440 @default.
• W2054698567 hasConcept C2779227376 @default.
• W2054698567 hasConcept C41008148 @default.
• W2054698567 hasConcept C49040817 @default.
• W2054698567 hasConcept C544956773 @default.
• W2054698567 hasConcept C62520636 @default.
• W2054698567 hasConcept C65682993 @default.
• W2054698567 hasConcept C71924100 @default.
• W2054698567 hasConcept C82706917 @default.
• W2054698567 hasConceptScore W2054698567C100460472 @default.
• W2054698567 hasConceptScore W2054698567C107187091 @default.
• W2054698567 hasConceptScore W2054698567C118381688 @default.
• W2054698567 hasConceptScore W2054698567C120665830 @default.
• W2054698567 hasConceptScore W2054698567C121332964 @default.
• W2054698567 hasConceptScore W2054698567C124634506 @default.
• W2054698567 hasConceptScore W2054698567C130472188 @default.
• W2054698567 hasConceptScore W2054698567C136525101 @default.
• W2054698567 hasConceptScore W2054698567C142724271 @default.
• W2054698567 hasConceptScore W2054698567C145148216 @default.
• W2054698567 hasConceptScore W2054698567C171250308 @default.
• W2054698567 hasConceptScore W2054698567C178790620 @default.
• W2054698567 hasConceptScore W2054698567C185592680 @default.
• W2054698567 hasConceptScore W2054698567C192562407 @default.
• W2054698567 hasConceptScore W2054698567C199360897 @default.
• W2054698567 hasConceptScore W2054698567C204787440 @default.
• W2054698567 hasConceptScore W2054698567C2779227376 @default.
• W2054698567 hasConceptScore W2054698567C41008148 @default.
• W2054698567 hasConceptScore W2054698567C49040817 @default.
• W2054698567 hasConceptScore W2054698567C544956773 @default.
• W2054698567 hasConceptScore W2054698567C62520636 @default.
• W2054698567 hasConceptScore W2054698567C65682993 @default.
• W2054698567 hasConceptScore W2054698567C71924100 @default.
• W2054698567 hasConceptScore W2054698567C82706917 @default.
• W2054698567 hasIssue "5" @default.
• W2054698567 hasLocation W20546985671 @default.
• W2054698567 hasOpenAccess W2054698567 @default.
• W2054698567 hasPrimaryLocation W20546985671 @default.
• W2054698567 hasRelatedWork W1332446 @default.
• W2054698567 hasRelatedWork W2023718213 @default.
• W2054698567 hasRelatedWork W2035159056 @default.
• W2054698567 hasRelatedWork W2051018996 @default.
• W2054698567 hasRelatedWork W2089438580 @default.
• W2054698567 hasRelatedWork W2093286625 @default.

• next