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- W2054722016 abstract "Li+-doped zinc oxide (ZnO) piezoelectric thin films with preferred c-axis orientation along (002) were fabricated by the sol–gel method. The doping sources of Li+ were LiCl, Li2 CO3 and their mixtures (LiCl + Li2 CO3). Effects of the three doping sources and annealing temperature on the characteristics of preferred c-axis orientation degree and resistivity of ZnO films were investigated. It was found that the annealing temperature at which the ZnO film had good preferred c-axis orientation decreased from 600 to 550 ° C. The increase in ZnO resistivity by doping LiCl was larger than that by doping Li2 CO3. The mixed-doped (5% LiCl + 5% Li2 CO3) ZnO film had good preferred c-axis orientation when annealed both at 550 and 600 ° C. The values of resistivity of the mixed-doped ZnO films were found to be 3 × 108 and 2 × 107 Ω cm with annealing temperatures at 550 and 600 ° C, respectively." @default.
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- W2054722016 date "2007-11-27" @default.
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- W2054722016 title "Comparison of Li+-doping sources on properties of ZnO piezoelectric films" @default.
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- W2054722016 doi "https://doi.org/10.1088/0031-8949/2007/t129/034" @default.
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