FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055069737> ?p ?o ?g. }

• W2055069737 endingPage "42" @default.
• W2055069737 startingPage "31" @default.
• W2055069737 abstract "A new low-voltage high-current column with a Schottky emission gun is presented, which generates an electron probe of 1 keV energy, 20 nA probe current and 50 nm in diameter. Additionally, the secondary electron detection is uniform for a large scan field which makes this column very suitable for wafer inspection and fast electron-beam testing of integrated circuits. A “low-voltage booster” is proposed which can be adapted to a conventional medium-voltage scanning electron microscope to improve its resolution for low-voltage operation. These new systems are compared with other existing low-voltage columns and components, and some principles of low-voltage electron optics are discussed." @default.
• W2055069737 created "2016-06-24" @default.
• W2055069737 creator A5052240369 @default.
• W2055069737 creator A5058055808 @default.
• W2055069737 creator A5060759799 @default.
• W2055069737 date "1995-09-01" @default.
• W2055069737 modified "2023-10-10" @default.
• W2055069737 title "Low-voltage probe forming columns for electrons" @default.
• W2055069737 cites W1964376545 @default.
• W2055069737 cites W1979727257 @default.
• W2055069737 cites W1981385996 @default.
• W2055069737 cites W1988073417 @default.
• W2055069737 cites W2002033889 @default.
• W2055069737 cites W2004625472 @default.
• W2055069737 cites W2006255585 @default.
• W2055069737 cites W2010565693 @default.
• W2055069737 cites W2012100691 @default.
• W2055069737 cites W2013265805 @default.
• W2055069737 cites W2016094852 @default.
• W2055069737 cites W2019935414 @default.
• W2055069737 cites W2033124588 @default.
• W2055069737 cites W2039202988 @default.
• W2055069737 cites W2048780932 @default.
• W2055069737 cites W2050860254 @default.
• W2055069737 cites W2057391139 @default.
• W2055069737 cites W2064246734 @default.
• W2055069737 cites W2075659091 @default.
• W2055069737 cites W2082865718 @default.
• W2055069737 cites W2097889901 @default.
• W2055069737 cites W2116890333 @default.
• W2055069737 cites W2140238117 @default.
• W2055069737 cites W2156915894 @default.
• W2055069737 cites W994429134 @default.
• W2055069737 doi "https://doi.org/10.1016/0168-9002(95)00254-5" @default.
• W2055069737 hasPublicationYear "1995" @default.
• W2055069737 type Work @default.
• W2055069737 sameAs 2055069737 @default.
• W2055069737 citedByCount "22" @default.
• W2055069737 countsByYear W20550697372014 @default.
• W2055069737 countsByYear W20550697372016 @default.
• W2055069737 countsByYear W20550697372017 @default.
• W2055069737 countsByYear W20550697372018 @default.
• W2055069737 countsByYear W20550697372022 @default.
• W2055069737 crossrefType "journal-article" @default.
• W2055069737 hasAuthorship W2055069737A5052240369 @default.
• W2055069737 hasAuthorship W2055069737A5058055808 @default.
• W2055069737 hasAuthorship W2055069737A5060759799 @default.
• W2055069737 hasConcept C119599485 @default.
• W2055069737 hasConcept C120665830 @default.
• W2055069737 hasConcept C121029787 @default.
• W2055069737 hasConcept C121332964 @default.
• W2055069737 hasConcept C127413603 @default.
• W2055069737 hasConcept C128624480 @default.
• W2055069737 hasConcept C138268822 @default.
• W2055069737 hasConcept C147120987 @default.
• W2055069737 hasConcept C154945302 @default.
• W2055069737 hasConcept C159985019 @default.
• W2055069737 hasConcept C160671074 @default.
• W2055069737 hasConcept C165801399 @default.
• W2055069737 hasConcept C179156687 @default.
• W2055069737 hasConcept C192562407 @default.
• W2055069737 hasConcept C205200001 @default.
• W2055069737 hasConcept C26771246 @default.
• W2055069737 hasConcept C2776808300 @default.
• W2055069737 hasConcept C34667332 @default.
• W2055069737 hasConcept C41008148 @default.
• W2055069737 hasConcept C49040817 @default.
• W2055069737 hasConcept C62520636 @default.
• W2055069737 hasConcept C78434282 @default.
• W2055069737 hasConcept C95312477 @default.
• W2055069737 hasConceptScore W2055069737C119599485 @default.
• W2055069737 hasConceptScore W2055069737C120665830 @default.
• W2055069737 hasConceptScore W2055069737C121029787 @default.
• W2055069737 hasConceptScore W2055069737C121332964 @default.
• W2055069737 hasConceptScore W2055069737C127413603 @default.
• W2055069737 hasConceptScore W2055069737C128624480 @default.
• W2055069737 hasConceptScore W2055069737C138268822 @default.
• W2055069737 hasConceptScore W2055069737C147120987 @default.
• W2055069737 hasConceptScore W2055069737C154945302 @default.
• W2055069737 hasConceptScore W2055069737C159985019 @default.
• W2055069737 hasConceptScore W2055069737C160671074 @default.
• W2055069737 hasConceptScore W2055069737C165801399 @default.
• W2055069737 hasConceptScore W2055069737C179156687 @default.
• W2055069737 hasConceptScore W2055069737C192562407 @default.
• W2055069737 hasConceptScore W2055069737C205200001 @default.
• W2055069737 hasConceptScore W2055069737C26771246 @default.
• W2055069737 hasConceptScore W2055069737C2776808300 @default.
• W2055069737 hasConceptScore W2055069737C34667332 @default.
• W2055069737 hasConceptScore W2055069737C41008148 @default.
• W2055069737 hasConceptScore W2055069737C49040817 @default.
• W2055069737 hasConceptScore W2055069737C62520636 @default.
• W2055069737 hasConceptScore W2055069737C78434282 @default.
• W2055069737 hasConceptScore W2055069737C95312477 @default.
• W2055069737 hasIssue "1-2" @default.
• W2055069737 hasLocation W20550697371 @default.
• W2055069737 hasOpenAccess W2055069737 @default.
• W2055069737 hasPrimaryLocation W20550697371 @default.
• W2055069737 hasRelatedWork W1548345389 @default.

• next