Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055103421> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2055103421 abstract "During the past ten years the highest requirements for an overall optical performance of microscope objectives have come from the semiconductor industry. The applications in the optical inspection and metrology of masks and wafers called for special lenses with long working distances and lenses with high magnification and high numerical aperture. Not only is the correction of image aberrations of importance, but among other features also the reduction of internal reflections and the autofocus capability. The performance of the latest generation of microscope objectives is demonstrated in comparison with older designs. While monochromatic image aberrations of modern lenses are negligible with regard to diffraction, the polychromatic correction is still a challenging task and defines the limitations in image quality. But even in this respect the newly developed Wild Leitz lens PL APO 100x/0.95 demonstrates that the physical limits have been reached both in design and manufacturing." @default.
- W2055103421 created "2016-06-24" @default.
- W2055103421 creator A5064799253 @default.
- W2055103421 date "1989-01-11" @default.
- W2055103421 modified "2023-09-23" @default.
- W2055103421 title "Microscope Objectives For Semiconductor Technology" @default.
- W2055103421 doi "https://doi.org/10.1117/12.961758" @default.
- W2055103421 hasPublicationYear "1989" @default.
- W2055103421 type Work @default.
- W2055103421 sameAs 2055103421 @default.
- W2055103421 citedByCount "3" @default.
- W2055103421 countsByYear W20551034212022 @default.
- W2055103421 crossrefType "proceedings-article" @default.
- W2055103421 hasAuthorship W2055103421A5064799253 @default.
- W2055103421 hasConcept C103764139 @default.
- W2055103421 hasConcept C115961682 @default.
- W2055103421 hasConcept C120665830 @default.
- W2055103421 hasConcept C121332964 @default.
- W2055103421 hasConcept C127413603 @default.
- W2055103421 hasConcept C15336307 @default.
- W2055103421 hasConcept C154945302 @default.
- W2055103421 hasConcept C159108749 @default.
- W2055103421 hasConcept C160671074 @default.
- W2055103421 hasConcept C192209626 @default.
- W2055103421 hasConcept C192562407 @default.
- W2055103421 hasConcept C195766429 @default.
- W2055103421 hasConcept C26771246 @default.
- W2055103421 hasConcept C40833965 @default.
- W2055103421 hasConcept C41008148 @default.
- W2055103421 hasConcept C4144372 @default.
- W2055103421 hasConcept C49040817 @default.
- W2055103421 hasConcept C55020928 @default.
- W2055103421 hasConcept C6260449 @default.
- W2055103421 hasConcept C67649825 @default.
- W2055103421 hasConcept C77017923 @default.
- W2055103421 hasConcept C78336883 @default.
- W2055103421 hasConcept C78519656 @default.
- W2055103421 hasConceptScore W2055103421C103764139 @default.
- W2055103421 hasConceptScore W2055103421C115961682 @default.
- W2055103421 hasConceptScore W2055103421C120665830 @default.
- W2055103421 hasConceptScore W2055103421C121332964 @default.
- W2055103421 hasConceptScore W2055103421C127413603 @default.
- W2055103421 hasConceptScore W2055103421C15336307 @default.
- W2055103421 hasConceptScore W2055103421C154945302 @default.
- W2055103421 hasConceptScore W2055103421C159108749 @default.
- W2055103421 hasConceptScore W2055103421C160671074 @default.
- W2055103421 hasConceptScore W2055103421C192209626 @default.
- W2055103421 hasConceptScore W2055103421C192562407 @default.
- W2055103421 hasConceptScore W2055103421C195766429 @default.
- W2055103421 hasConceptScore W2055103421C26771246 @default.
- W2055103421 hasConceptScore W2055103421C40833965 @default.
- W2055103421 hasConceptScore W2055103421C41008148 @default.
- W2055103421 hasConceptScore W2055103421C4144372 @default.
- W2055103421 hasConceptScore W2055103421C49040817 @default.
- W2055103421 hasConceptScore W2055103421C55020928 @default.
- W2055103421 hasConceptScore W2055103421C6260449 @default.
- W2055103421 hasConceptScore W2055103421C67649825 @default.
- W2055103421 hasConceptScore W2055103421C77017923 @default.
- W2055103421 hasConceptScore W2055103421C78336883 @default.
- W2055103421 hasConceptScore W2055103421C78519656 @default.
- W2055103421 hasLocation W20551034211 @default.
- W2055103421 hasOpenAccess W2055103421 @default.
- W2055103421 hasPrimaryLocation W20551034211 @default.
- W2055103421 hasRelatedWork W1977712027 @default.
- W2055103421 hasRelatedWork W1979610783 @default.
- W2055103421 hasRelatedWork W1982966356 @default.
- W2055103421 hasRelatedWork W1997677474 @default.
- W2055103421 hasRelatedWork W2003338936 @default.
- W2055103421 hasRelatedWork W2005321425 @default.
- W2055103421 hasRelatedWork W2010832270 @default.
- W2055103421 hasRelatedWork W2024159616 @default.
- W2055103421 hasRelatedWork W2027055492 @default.
- W2055103421 hasRelatedWork W2041400880 @default.
- W2055103421 hasRelatedWork W2053317086 @default.
- W2055103421 hasRelatedWork W2069660943 @default.
- W2055103421 hasRelatedWork W2189411135 @default.
- W2055103421 hasRelatedWork W2337909229 @default.
- W2055103421 hasRelatedWork W2781537632 @default.
- W2055103421 hasRelatedWork W2917403451 @default.
- W2055103421 hasRelatedWork W1847734192 @default.
- W2055103421 hasRelatedWork W1969065284 @default.
- W2055103421 hasRelatedWork W2091593368 @default.
- W2055103421 hasRelatedWork W315145143 @default.
- W2055103421 isParatext "false" @default.
- W2055103421 isRetracted "false" @default.
- W2055103421 magId "2055103421" @default.
- W2055103421 workType "article" @default.