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- W2055141057 abstract "The use of a small spot of light for the detection of semiconductor inhomogeneities, is described. The method employed involves a scanned measurement of the surface photovoltage generated in the surface space charge region of the semiconductor. It is shown that scanned surface photovoltage signals may be used to detect defects in Si using either MOS, Schottky barrier or electrolyte contacts to sense the signal. Furthermore, from a spectral measurement it is possible to monitor the variation of carrier lifetime across the area of the sample. It has proven possible using the technique to detect both gross defects in the Si as well as to measure, on a point by point basis, the reduction in carrier lifetime due to them." @default.
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- W2055141057 title "Semiconductor profiling using an optical probe" @default.
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