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- W2055245306 abstract "Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation Sanjo Lee, Sunnup Lee, Sungwoon Lee, D. Jeon, Kwang-Ryeol Lee; Self-aligned silicon tips coated with diamondlike carbon. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1 March 1997; 15 (2): 457–459. https://doi.org/10.1116/1.589598 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology B Search Advanced Search |Citation Search" @default.
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- W2055245306 date "1997-03-01" @default.
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- W2055245306 title "Self-aligned silicon tips coated with diamondlike carbon" @default.
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