FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055271812> ?p ?o ?g. }

• W2055271812 endingPage "186" @default.
• W2055271812 startingPage "182" @default.
• W2055271812 abstract "This paper describes the effect of annealing on ultrathin oxynitride films on Si(100) surface prepared by the dissociative interaction of nitric oxide (NO) at room temperature. Ultraviolet and X-ray photoelectron spectroscopy (UPS and XPS) and Auger electron spectroscopy (AES) have been employed to understand the clustering phenomenon of approximately monolayer thick oxynitride layer. On annealing the oxynitride at ∼500°C, nitrogen atoms move preferentially towards the interface. In the UPS, absence of the reappearance of surface states even after annealing the oxynitride to ∼720°C suggests a resistance to clustering of the oxynitride layer. This is in contrast to the annealing behavior of pure SiO2 film where clustering begins at temperatures as low as 190°C. On further annealing of the oxynitride film at 830°C, the SiN species remain on the surface due to the selective desorption of SiO species. Upon exposing oxygen to this surface, selective adsorption takes place on the bare Si areas exposed by the desorption of SiO. We believe that the enhanced thermal stability of ultrathin silicon oxynitride is due to the stabilization of the interface by the nitrogen atoms incorporated preferentially at the Si/SiO2 interface." @default.
• W2055271812 created "2016-06-24" @default.
• W2055271812 creator A5008078597 @default.
• W2055271812 creator A5008899365 @default.
• W2055271812 creator A5088457209 @default.
• W2055271812 date "1998-06-01" @default.
• W2055271812 modified "2023-09-27" @default.
• W2055271812 title "Improved thermal stability of ultrathin silicon oxynitride layer due to nitrogen incorporation at the interface" @default.
• W2055271812 cites W1532896326 @default.
• W2055271812 cites W1972397193 @default.
• W2055271812 cites W1975734665 @default.
• W2055271812 cites W1977419538 @default.
• W2055271812 cites W2022505779 @default.
• W2055271812 cites W2023647526 @default.
• W2055271812 cites W2033737066 @default.
• W2055271812 cites W2043973369 @default.
• W2055271812 cites W2065018242 @default.
• W2055271812 cites W2066342630 @default.
• W2055271812 cites W2091654480 @default.
• W2055271812 cites W2094214565 @default.
• W2055271812 cites W2094530247 @default.
• W2055271812 cites W2146982919 @default.
• W2055271812 cites W2150508525 @default.
• W2055271812 cites W2320365249 @default.
• W2055271812 doi "https://doi.org/10.1016/s0169-4332(98)00047-6" @default.
• W2055271812 hasPublicationYear "1998" @default.
• W2055271812 type Work @default.
• W2055271812 sameAs 2055271812 @default.
• W2055271812 citedByCount "14" @default.
• W2055271812 countsByYear W20552718122016 @default.
• W2055271812 countsByYear W20552718122017 @default.
• W2055271812 countsByYear W20552718122018 @default.
• W2055271812 countsByYear W20552718122020 @default.
• W2055271812 crossrefType "journal-article" @default.
• W2055271812 hasAuthorship W2055271812A5008078597 @default.
• W2055271812 hasAuthorship W2055271812A5008899365 @default.
• W2055271812 hasAuthorship W2055271812A5088457209 @default.
• W2055271812 hasConcept C113196181 @default.
• W2055271812 hasConcept C121332964 @default.
• W2055271812 hasConcept C127413603 @default.
• W2055271812 hasConcept C147789679 @default.
• W2055271812 hasConcept C150394285 @default.
• W2055271812 hasConcept C159985019 @default.
• W2055271812 hasConcept C162711632 @default.
• W2055271812 hasConcept C175708663 @default.
• W2055271812 hasConcept C178790620 @default.
• W2055271812 hasConcept C185544564 @default.
• W2055271812 hasConcept C185592680 @default.
• W2055271812 hasConcept C191897082 @default.
• W2055271812 hasConcept C192562407 @default.
• W2055271812 hasConcept C25442681 @default.
• W2055271812 hasConcept C2777431650 @default.
• W2055271812 hasConcept C2777855556 @default.
• W2055271812 hasConcept C2779105228 @default.
• W2055271812 hasConcept C2779476251 @default.
• W2055271812 hasConcept C2779851234 @default.
• W2055271812 hasConcept C42360764 @default.
• W2055271812 hasConcept C43617362 @default.
• W2055271812 hasConcept C49040817 @default.
• W2055271812 hasConcept C537208039 @default.
• W2055271812 hasConcept C544956773 @default.
• W2055271812 hasConcept C59061564 @default.
• W2055271812 hasConceptScore W2055271812C113196181 @default.
• W2055271812 hasConceptScore W2055271812C121332964 @default.
• W2055271812 hasConceptScore W2055271812C127413603 @default.
• W2055271812 hasConceptScore W2055271812C147789679 @default.
• W2055271812 hasConceptScore W2055271812C150394285 @default.
• W2055271812 hasConceptScore W2055271812C159985019 @default.
• W2055271812 hasConceptScore W2055271812C162711632 @default.
• W2055271812 hasConceptScore W2055271812C175708663 @default.
• W2055271812 hasConceptScore W2055271812C178790620 @default.
• W2055271812 hasConceptScore W2055271812C185544564 @default.
• W2055271812 hasConceptScore W2055271812C185592680 @default.
• W2055271812 hasConceptScore W2055271812C191897082 @default.
• W2055271812 hasConceptScore W2055271812C192562407 @default.
• W2055271812 hasConceptScore W2055271812C25442681 @default.
• W2055271812 hasConceptScore W2055271812C2777431650 @default.
• W2055271812 hasConceptScore W2055271812C2777855556 @default.
• W2055271812 hasConceptScore W2055271812C2779105228 @default.
• W2055271812 hasConceptScore W2055271812C2779476251 @default.
• W2055271812 hasConceptScore W2055271812C2779851234 @default.
• W2055271812 hasConceptScore W2055271812C42360764 @default.
• W2055271812 hasConceptScore W2055271812C43617362 @default.
• W2055271812 hasConceptScore W2055271812C49040817 @default.
• W2055271812 hasConceptScore W2055271812C537208039 @default.
• W2055271812 hasConceptScore W2055271812C544956773 @default.
• W2055271812 hasConceptScore W2055271812C59061564 @default.
• W2055271812 hasLocation W20552718121 @default.
• W2055271812 hasOpenAccess W2055271812 @default.
• W2055271812 hasPrimaryLocation W20552718121 @default.
• W2055271812 hasRelatedWork W1535647204 @default.
• W2055271812 hasRelatedWork W1969034913 @default.
• W2055271812 hasRelatedWork W1982933493 @default.
• W2055271812 hasRelatedWork W1989052695 @default.
• W2055271812 hasRelatedWork W1993535388 @default.
• W2055271812 hasRelatedWork W2000238188 @default.
• W2055271812 hasRelatedWork W2028655826 @default.
• W2055271812 hasRelatedWork W2049777924 @default.

• next