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- W2055289916 abstract "A 1.6 kJ plasma focus source was demonstrated as an electron source for microlithography. Resolution better than was obtained. The total energy in the beam and the energy of electrons was estimated from the lithographs to be > 20 mJ per shot with energy > 20 keV and > 1 J with energy keV." @default.
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- W2055289916 date "1997-08-01" @default.
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- W2055289916 title "Electron lithography using a compact plasma focus" @default.
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- W2055289916 doi "https://doi.org/10.1088/0963-0252/6/3/011" @default.
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