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• W2055330308 abstract "Abstract Employing the well-known TRIM Monte Carlo simulation program we develop a method to calculate the statistical distribution functions (sdf) of all particles moving in ion-beam induced collision cascades within amorphous targets. This procedure is applied to the 50 keV B + , P + , As + , Sb + and Bi + implantation into silicon at normal ion incidence. The bulk behaviour of the energy and directional distributions for the incident ions and the target recoils is studied at five characteristic depths ( R p −2 ΔR p , R p − ΔR p , R p , R p + ΔR p , R p + 2 ΔR p ). Further, the directional distributions of the recoils in the near surface region (0, R p −3.25 ΔR p , R p −3 ΔR p ) are investigated. The correlation of the depth dependence of the normalized particle flux and the anisotropy parameter with the profiles of the nuclear energy deposition and the nuclear momentum deposition is discussed. Finally, we compare the results of the computer simulations for the directional distribution, the anisotropy parameter and the normalized particle flux of the recoils with the corresponding values obtained from the analytical theory of Sigmund." @default.
• W2055330308 created "2016-06-24" @default.
• W2055330308 creator A5061152758 @default.
• W2055330308 date "1989-04-01" @default.
• W2055330308 modified "2023-09-27" @default.
• W2055330308 title "Computer studies of statistical distribution functions of particles moving in ion-beam-induced collision cascades within amorphous solids" @default.
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• W2055330308 doi "https://doi.org/10.1016/0168-583x(89)90345-5" @default.
• W2055330308 hasPublicationYear "1989" @default.
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