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- W2055331311 abstract "Abstract The interface and bulk qualities of N 2 O-based oxides are investigated by means of backsurface Ar + bombardment and hot-carrier stressings. It is deduced that there exists a large mechanical stress near the oxide/Si interface for N 2 O-grown oxide which might result from its initial accelerated growth phase, while the residual stress is negligible for N 2 O-nitrided oxide. Therefore, in view of another stress induced by the bombardment, the interfacial properties can be improved for N 2 O-grown oxide through stress compensation, but deteriorate for N 2 O-nitrided oxide due to increased mechanical stress, indicating fresh N 2 O-nitrided oxide itself has excellent interfacial and bulk qualities for high-performance devices. Moreover, for N 2 O-grown oxide, the improvement exhibits a turnaround behavior for long bombardment times due to stress over-compensation." @default.
- W2055331311 created "2016-06-24" @default.
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- W2055331311 date "1998-11-01" @default.
- W2055331311 modified "2023-10-02" @default.
- W2055331311 title "A comparison between the interface properties of N2O-nitrided and N2O-grown oxides" @default.
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- W2055331311 doi "https://doi.org/10.1016/s0038-1101(98)00176-2" @default.
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