Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055377231> ?p ?o ?g. }
- W2055377231 endingPage "2928" @default.
- W2055377231 startingPage "2924" @default.
- W2055377231 abstract "Crystalline bismuth silicate films were grown on a Si substrate by metalorganic chemical vapor deposition. A 100 nm SiO2 layer on Si was changed to bismuth silicate film by the reaction with a Bi and O2 gas mixture. A deposition of less than 30 min formed a single-crystalline phase, having a certain crystallographic relation with (100)Si substrate. The capacitance of the specimen has increased fivefold over that of the original specimen. The crystallinity of deposited films was increased markedly by heat treatment. At the same time, the capacitance of the specimen increased. However, the oxidation of the Si substrate and the formation of a Bi-rich surface caused a drastic decrease in the capacitance of the specimen." @default.
- W2055377231 created "2016-06-24" @default.
- W2055377231 creator A5002876587 @default.
- W2055377231 creator A5007200120 @default.
- W2055377231 creator A5050336266 @default.
- W2055377231 creator A5082390636 @default.
- W2055377231 date "1994-03-15" @default.
- W2055377231 modified "2023-09-24" @default.
- W2055377231 title "Growth of bismuth silicate films on Si and its dielectric properties" @default.
- W2055377231 cites W1974553668 @default.
- W2055377231 cites W2037404174 @default.
- W2055377231 cites W2040537365 @default.
- W2055377231 cites W2053179920 @default.
- W2055377231 cites W2098759949 @default.
- W2055377231 cites W2132385942 @default.
- W2055377231 cites W2158625411 @default.
- W2055377231 cites W4246749317 @default.
- W2055377231 doi "https://doi.org/10.1063/1.356186" @default.
- W2055377231 hasPublicationYear "1994" @default.
- W2055377231 type Work @default.
- W2055377231 sameAs 2055377231 @default.
- W2055377231 citedByCount "19" @default.
- W2055377231 countsByYear W20553772312013 @default.
- W2055377231 countsByYear W20553772312015 @default.
- W2055377231 countsByYear W20553772312019 @default.
- W2055377231 countsByYear W20553772312020 @default.
- W2055377231 crossrefType "journal-article" @default.
- W2055377231 hasAuthorship W2055377231A5002876587 @default.
- W2055377231 hasAuthorship W2055377231A5007200120 @default.
- W2055377231 hasAuthorship W2055377231A5050336266 @default.
- W2055377231 hasAuthorship W2055377231A5082390636 @default.
- W2055377231 hasConcept C110738630 @default.
- W2055377231 hasConcept C111368507 @default.
- W2055377231 hasConcept C113196181 @default.
- W2055377231 hasConcept C127313418 @default.
- W2055377231 hasConcept C127413603 @default.
- W2055377231 hasConcept C133386390 @default.
- W2055377231 hasConcept C147789679 @default.
- W2055377231 hasConcept C151730666 @default.
- W2055377231 hasConcept C159985019 @default.
- W2055377231 hasConcept C171250308 @default.
- W2055377231 hasConcept C17525397 @default.
- W2055377231 hasConcept C185592680 @default.
- W2055377231 hasConcept C191897082 @default.
- W2055377231 hasConcept C192562407 @default.
- W2055377231 hasConcept C199289684 @default.
- W2055377231 hasConcept C2777289219 @default.
- W2055377231 hasConcept C2777335606 @default.
- W2055377231 hasConcept C2779227376 @default.
- W2055377231 hasConcept C2816523 @default.
- W2055377231 hasConcept C30066665 @default.
- W2055377231 hasConcept C42360764 @default.
- W2055377231 hasConcept C43617362 @default.
- W2055377231 hasConcept C46275449 @default.
- W2055377231 hasConcept C49040817 @default.
- W2055377231 hasConcept C533668322 @default.
- W2055377231 hasConcept C544956773 @default.
- W2055377231 hasConcept C57410435 @default.
- W2055377231 hasConcept C64297162 @default.
- W2055377231 hasConcept C86803240 @default.
- W2055377231 hasConceptScore W2055377231C110738630 @default.
- W2055377231 hasConceptScore W2055377231C111368507 @default.
- W2055377231 hasConceptScore W2055377231C113196181 @default.
- W2055377231 hasConceptScore W2055377231C127313418 @default.
- W2055377231 hasConceptScore W2055377231C127413603 @default.
- W2055377231 hasConceptScore W2055377231C133386390 @default.
- W2055377231 hasConceptScore W2055377231C147789679 @default.
- W2055377231 hasConceptScore W2055377231C151730666 @default.
- W2055377231 hasConceptScore W2055377231C159985019 @default.
- W2055377231 hasConceptScore W2055377231C171250308 @default.
- W2055377231 hasConceptScore W2055377231C17525397 @default.
- W2055377231 hasConceptScore W2055377231C185592680 @default.
- W2055377231 hasConceptScore W2055377231C191897082 @default.
- W2055377231 hasConceptScore W2055377231C192562407 @default.
- W2055377231 hasConceptScore W2055377231C199289684 @default.
- W2055377231 hasConceptScore W2055377231C2777289219 @default.
- W2055377231 hasConceptScore W2055377231C2777335606 @default.
- W2055377231 hasConceptScore W2055377231C2779227376 @default.
- W2055377231 hasConceptScore W2055377231C2816523 @default.
- W2055377231 hasConceptScore W2055377231C30066665 @default.
- W2055377231 hasConceptScore W2055377231C42360764 @default.
- W2055377231 hasConceptScore W2055377231C43617362 @default.
- W2055377231 hasConceptScore W2055377231C46275449 @default.
- W2055377231 hasConceptScore W2055377231C49040817 @default.
- W2055377231 hasConceptScore W2055377231C533668322 @default.
- W2055377231 hasConceptScore W2055377231C544956773 @default.
- W2055377231 hasConceptScore W2055377231C57410435 @default.
- W2055377231 hasConceptScore W2055377231C64297162 @default.
- W2055377231 hasConceptScore W2055377231C86803240 @default.
- W2055377231 hasIssue "6" @default.
- W2055377231 hasLocation W20553772311 @default.
- W2055377231 hasOpenAccess W2055377231 @default.
- W2055377231 hasPrimaryLocation W20553772311 @default.
- W2055377231 hasRelatedWork W1982635368 @default.
- W2055377231 hasRelatedWork W1996777073 @default.
- W2055377231 hasRelatedWork W2000361250 @default.
- W2055377231 hasRelatedWork W2020503418 @default.
- W2055377231 hasRelatedWork W2055754760 @default.