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• W2055440867 abstract "This paper reports the very low power consumption MEMS scanner that utilizes the electrostatic field generated by alkali-ion electret. The alkali-ion electret formed on comb electrodes of the scanner provides built-in potential for the electro-static actuator so that no bias voltage is necessary. The power consumption of prototype MEMS scanner was 0.57 μW (bias voltage: DC 0 V, driving voltage: AC 9 Vpp, deflection angle: 12°, resonance frequency: 1.4 kHz,). It is possible to realize further low power consumption by increasing the force factor of comb-electrodes." @default.
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• W2055440867 date "2014-01-01" @default.
• W2055440867 modified "2023-09-26" @default.
• W2055440867 title "Very low power consumption MEMS scanner with alkali electret comb drive" @default.
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• W2055440867 doi "https://doi.org/10.1109/memsys.2014.6765870" @default.
• W2055440867 hasPublicationYear "2014" @default.
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