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• W2055464273 abstract "ABSTRACT Electron field emission and electrical conductivity of undoped and nitrogen doped DLC films have been investigated. The films were grown by the PE CVD method from CH 4 :H 2 and CH 4 :H 2 :N 2 gas mixtures, respectively. By varying nitrogen content in the gas mixture over the range 0 to 45%, corresponding concentrations of 0 to 8 % (atomic) could be achieved in the films. Three different gas pressures were used in the deposition chamber: 0.2, 0.6 and 0.8 Torr. Emission current measurements were performed at approximately 10 −6 Torr using the diode method with emitter-anode spacing set at 20 gm. The current - voltage characteristics of the Si field electron emission arrays covered with DLC films show that threshold voltage (V th ) varies in a complex manner with nitrogen content. As a function of nitrogen content, V th initially increases rapidly, then decreases and finally increases again for the highest concentration. Corresponding Fowler-Nordheim (F-N) plots follow F-N tunneling over a wide range. The F-N plots were used for determination of the work function, threshold voltage, field enhancement factor and effective emission area. For a qualitative explanation of experimental results, we treat the DLC film as a diamond-like (sp 3 bonded) matrix with graphite-like inclusions." @default.
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• W2055464273 date "1999-01-01" @default.
• W2055464273 modified "2023-09-25" @default.
• W2055464273 title "Electron Field Emission from Undoped and Doped DLC Films" @default.
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• W2055464273 doi "https://doi.org/10.1557/proc-558-577" @default.
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