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- W2055469111 abstract "The RF electric field penetration and the power deposition into planar-type inductively coupled plasmas in low-pressure discharges have been studied by means of a self-consistent model which consists of Maxwell equations combined with the kinetic equation of electrons. The Maxwell equations are solved based on the expansion of the Fourier–Bessel series for determining the RF electric field. Numerical results show the influence of a non-Maxwellian electron energy distribution on the RF electric field penetration and the power deposition for different coil currents. Moreover, the two-dimensional spatial profiles of RF electric field and power density are also shown for different numbers of RF coil turns." @default.
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- W2055469111 date "2007-07-01" @default.
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- W2055469111 title "RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plasmas" @default.
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- W2055469111 doi "https://doi.org/10.1088/1009-1963/16/7/040" @default.
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