Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055476923> ?p ?o ?g. }
- W2055476923 endingPage "221" @default.
- W2055476923 startingPage "217" @default.
- W2055476923 abstract "The interaction of laser irradiation with SiOx films, and the process of decomposition of SiOx on SiO2 and Si nanocrystals under the influence of laser irradiation are investigated. The mathematical modeling of temperature distribution in a c-Si wafer as well as on its surface is carried out. It is shown that laser pulses can efficiently heat up the samples of crystalline silicon. Using multi-pulse procedure, the temperature necessary for annealing can be achieved with lower intensity of laser irradiation. Experimental investigations of laser-annealed SiOx films allowed determining their transformation with the formation of nanoislands. It was concluded that the surface topology, dielectric matrix structure, and electrical conductivity depend on laser beam intensity during the annealing process." @default.
- W2055476923 created "2016-06-24" @default.
- W2055476923 creator A5003937845 @default.
- W2055476923 creator A5012191601 @default.
- W2055476923 creator A5020685062 @default.
- W2055476923 creator A5035277323 @default.
- W2055476923 creator A5041874093 @default.
- W2055476923 creator A5085910232 @default.
- W2055476923 creator A5085952405 @default.
- W2055476923 creator A5089238961 @default.
- W2055476923 date "2015-05-01" @default.
- W2055476923 modified "2023-09-27" @default.
- W2055476923 title "Influence of laser annealing on SiOx films properties" @default.
- W2055476923 cites W1554414450 @default.
- W2055476923 cites W1598285744 @default.
- W2055476923 cites W1638568437 @default.
- W2055476923 cites W1970627259 @default.
- W2055476923 cites W1971947236 @default.
- W2055476923 cites W1977199049 @default.
- W2055476923 cites W1988097674 @default.
- W2055476923 cites W1988199733 @default.
- W2055476923 cites W1991005715 @default.
- W2055476923 cites W1992301072 @default.
- W2055476923 cites W1997842518 @default.
- W2055476923 cites W2001597291 @default.
- W2055476923 cites W2005083586 @default.
- W2055476923 cites W2021122851 @default.
- W2055476923 cites W2021328089 @default.
- W2055476923 cites W2025496637 @default.
- W2055476923 cites W2033185055 @default.
- W2055476923 cites W2037512384 @default.
- W2055476923 cites W2047157287 @default.
- W2055476923 cites W2057824029 @default.
- W2055476923 cites W2058926908 @default.
- W2055476923 cites W2060036126 @default.
- W2055476923 cites W2066659585 @default.
- W2055476923 cites W2069623920 @default.
- W2055476923 cites W2071451731 @default.
- W2055476923 cites W2079167037 @default.
- W2055476923 cites W2084248206 @default.
- W2055476923 cites W2088806214 @default.
- W2055476923 cites W2091165592 @default.
- W2055476923 cites W2091288812 @default.
- W2055476923 cites W2101587168 @default.
- W2055476923 cites W2138534942 @default.
- W2055476923 cites W2183473628 @default.
- W2055476923 cites W2186361516 @default.
- W2055476923 cites W2613496164 @default.
- W2055476923 cites W2752082642 @default.
- W2055476923 cites W93090407 @default.
- W2055476923 doi "https://doi.org/10.1016/j.apsusc.2014.11.066" @default.
- W2055476923 hasPublicationYear "2015" @default.
- W2055476923 type Work @default.
- W2055476923 sameAs 2055476923 @default.
- W2055476923 citedByCount "11" @default.
- W2055476923 countsByYear W20554769232017 @default.
- W2055476923 countsByYear W20554769232018 @default.
- W2055476923 countsByYear W20554769232019 @default.
- W2055476923 countsByYear W20554769232020 @default.
- W2055476923 countsByYear W20554769232021 @default.
- W2055476923 countsByYear W20554769232022 @default.
- W2055476923 crossrefType "journal-article" @default.
- W2055476923 hasAuthorship W2055476923A5003937845 @default.
- W2055476923 hasAuthorship W2055476923A5012191601 @default.
- W2055476923 hasAuthorship W2055476923A5020685062 @default.
- W2055476923 hasAuthorship W2055476923A5035277323 @default.
- W2055476923 hasAuthorship W2055476923A5041874093 @default.
- W2055476923 hasAuthorship W2055476923A5085910232 @default.
- W2055476923 hasAuthorship W2055476923A5085952405 @default.
- W2055476923 hasAuthorship W2055476923A5089238961 @default.
- W2055476923 hasConcept C107872376 @default.
- W2055476923 hasConcept C113196181 @default.
- W2055476923 hasConcept C120665830 @default.
- W2055476923 hasConcept C121332964 @default.
- W2055476923 hasConcept C159985019 @default.
- W2055476923 hasConcept C171250308 @default.
- W2055476923 hasConcept C185592680 @default.
- W2055476923 hasConcept C192562407 @default.
- W2055476923 hasConcept C2777855556 @default.
- W2055476923 hasConcept C49040817 @default.
- W2055476923 hasConcept C520434653 @default.
- W2055476923 hasConceptScore W2055476923C107872376 @default.
- W2055476923 hasConceptScore W2055476923C113196181 @default.
- W2055476923 hasConceptScore W2055476923C120665830 @default.
- W2055476923 hasConceptScore W2055476923C121332964 @default.
- W2055476923 hasConceptScore W2055476923C159985019 @default.
- W2055476923 hasConceptScore W2055476923C171250308 @default.
- W2055476923 hasConceptScore W2055476923C185592680 @default.
- W2055476923 hasConceptScore W2055476923C192562407 @default.
- W2055476923 hasConceptScore W2055476923C2777855556 @default.
- W2055476923 hasConceptScore W2055476923C49040817 @default.
- W2055476923 hasConceptScore W2055476923C520434653 @default.
- W2055476923 hasLocation W20554769231 @default.
- W2055476923 hasOpenAccess W2055476923 @default.
- W2055476923 hasPrimaryLocation W20554769231 @default.
- W2055476923 hasRelatedWork W2058676402 @default.
- W2055476923 hasRelatedWork W2101745613 @default.
- W2055476923 hasRelatedWork W2151650341 @default.