Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055505087> ?p ?o ?g. }
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84
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- W2055505087 endingPage "3233" @default.
- W2055505087 startingPage "3230" @default.
- W2055505087 abstract "This work presents a reproducible, super-self-aligned approach for fabricating back-gate∕double-gate transistors with a thin silicon channel and thick doped source∕drain polysilicon access regions. Such a device structure can lead to ultimate electrostatic control of the channel without sacrificing source∕drain series resistance in a deeply scaled field effect transistor. The approach consists of a unique combination of silicon complementary-metal-oxide-semiconductor front-end processing techniques, along with wafer bonding, sidewall spacer formation (in oxide and nitride), solid-state junction diffusion, and multistage chemical mechanical polishing for wafer-level planarization. The authors further demonstrate the formation of a reliable contact at the source∕drain junction interface between doped polysilicon and the undoped silicon channel. In the design, through oxidation, the authors are able to introduce strain in the structure, as well as buried interconnects in a plane below the device. Both n-channel and p-channel devices have shown high drive currents, strong back-gate coupling, and high effective carrier mobility." @default.
- W2055505087 created "2016-06-24" @default.
- W2055505087 creator A5003855273 @default.
- W2055505087 creator A5014894826 @default.
- W2055505087 creator A5021964494 @default.
- W2055505087 creator A5059246379 @default.
- W2055505087 creator A5073768434 @default.
- W2055505087 creator A5082003739 @default.
- W2055505087 date "2006-11-01" @default.
- W2055505087 modified "2023-10-11" @default.
- W2055505087 title "Super-self-aligned back-gate∕double-gate planar transistors: Novel fabrication approach" @default.
- W2055505087 cites W2033800539 @default.
- W2055505087 cites W2115352672 @default.
- W2055505087 cites W2142796540 @default.
- W2055505087 cites W2149671060 @default.
- W2055505087 cites W2294398660 @default.
- W2055505087 doi "https://doi.org/10.1116/1.2397067" @default.
- W2055505087 hasPublicationYear "2006" @default.
- W2055505087 type Work @default.
- W2055505087 sameAs 2055505087 @default.
- W2055505087 citedByCount "2" @default.
- W2055505087 countsByYear W20555050872019 @default.
- W2055505087 crossrefType "journal-article" @default.
- W2055505087 hasAuthorship W2055505087A5003855273 @default.
- W2055505087 hasAuthorship W2055505087A5014894826 @default.
- W2055505087 hasAuthorship W2055505087A5021964494 @default.
- W2055505087 hasAuthorship W2055505087A5059246379 @default.
- W2055505087 hasAuthorship W2055505087A5073768434 @default.
- W2055505087 hasAuthorship W2055505087A5082003739 @default.
- W2055505087 hasConcept C119599485 @default.
- W2055505087 hasConcept C127413603 @default.
- W2055505087 hasConcept C136525101 @default.
- W2055505087 hasConcept C142724271 @default.
- W2055505087 hasConcept C145598152 @default.
- W2055505087 hasConcept C160671074 @default.
- W2055505087 hasConcept C165801399 @default.
- W2055505087 hasConcept C171250308 @default.
- W2055505087 hasConcept C172385210 @default.
- W2055505087 hasConcept C180088628 @default.
- W2055505087 hasConcept C192562407 @default.
- W2055505087 hasConcept C204787440 @default.
- W2055505087 hasConcept C2361726 @default.
- W2055505087 hasConcept C2779227376 @default.
- W2055505087 hasConcept C49040817 @default.
- W2055505087 hasConcept C544956773 @default.
- W2055505087 hasConcept C71924100 @default.
- W2055505087 hasConceptScore W2055505087C119599485 @default.
- W2055505087 hasConceptScore W2055505087C127413603 @default.
- W2055505087 hasConceptScore W2055505087C136525101 @default.
- W2055505087 hasConceptScore W2055505087C142724271 @default.
- W2055505087 hasConceptScore W2055505087C145598152 @default.
- W2055505087 hasConceptScore W2055505087C160671074 @default.
- W2055505087 hasConceptScore W2055505087C165801399 @default.
- W2055505087 hasConceptScore W2055505087C171250308 @default.
- W2055505087 hasConceptScore W2055505087C172385210 @default.
- W2055505087 hasConceptScore W2055505087C180088628 @default.
- W2055505087 hasConceptScore W2055505087C192562407 @default.
- W2055505087 hasConceptScore W2055505087C204787440 @default.
- W2055505087 hasConceptScore W2055505087C2361726 @default.
- W2055505087 hasConceptScore W2055505087C2779227376 @default.
- W2055505087 hasConceptScore W2055505087C49040817 @default.
- W2055505087 hasConceptScore W2055505087C544956773 @default.
- W2055505087 hasConceptScore W2055505087C71924100 @default.
- W2055505087 hasIssue "6" @default.
- W2055505087 hasLocation W20555050871 @default.
- W2055505087 hasOpenAccess W2055505087 @default.
- W2055505087 hasPrimaryLocation W20555050871 @default.
- W2055505087 hasRelatedWork W1534416854 @default.
- W2055505087 hasRelatedWork W1676547379 @default.
- W2055505087 hasRelatedWork W1970197735 @default.
- W2055505087 hasRelatedWork W1992892446 @default.
- W2055505087 hasRelatedWork W2063388817 @default.
- W2055505087 hasRelatedWork W2100598108 @default.
- W2055505087 hasRelatedWork W2136172476 @default.
- W2055505087 hasRelatedWork W2173048512 @default.
- W2055505087 hasRelatedWork W4307555315 @default.
- W2055505087 hasRelatedWork W4381745617 @default.
- W2055505087 hasVolume "24" @default.
- W2055505087 isParatext "false" @default.
- W2055505087 isRetracted "false" @default.
- W2055505087 magId "2055505087" @default.
- W2055505087 workType "article" @default.