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- W2055625642 abstract "The method of measurement of two-dimensional flatness of etalons are proposed. Fundamental idea is to measure diameters of interference rings produced on CCD camera. The reproducibility is about (lambda) /1800." @default.
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- W2055625642 date "1999-05-07" @default.
- W2055625642 modified "2023-09-23" @default.
- W2055625642 title "<title>Accurate measurement of the flatness of etalons</title>" @default.
- W2055625642 doi "https://doi.org/10.1117/12.347756" @default.
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