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- W2055640010 abstract "Abstract The sputtering efficiency (i.e. the ratio of reflected to incident energy) has been measured for graphite, aluminum, silicon, copper, silver, tantalum, and lead with 30–75 keV He+, C+, Ne+, Ar+, Cu + , Kr + , Xe+, and Pb+ ions at perpendicular incidence. The measured efficiencies range from 0.5 per cent (He+ → Si) to 7 per cent (Ne+ → Pb). In accordance with theory, the results for heavier projectiles may be represented as a function of the ratio of target-to-projectile masses M 2 /M 1 only. The results are either energy independent or they decrease with increasing energy, the energy dependence being more pronounced the lighter the targets and projectile." @default.
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- W2055640010 title "The sputtering efficiency of polycrystalline solids" @default.
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- W2055640010 doi "https://doi.org/10.1080/00337577008235616" @default.
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