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- W2055737688 abstract "Structures fabricated during the development of a process for making three-dimensionally interconnected integrated circuits using electron beam recrystallization of silicon on insulator have been microsectioned and examined in the scanning ion microscope. This provided detailed information, not accessible by standard analysis techniques, concerning the effects of processing at specific sites in the structures." @default.
- W2055737688 created "2016-06-24" @default.
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- W2055737688 date "1988-11-01" @default.
- W2055737688 modified "2023-10-17" @default.
- W2055737688 title "Scanning ion microscopy and microsectioning of electron beam recrystallized silicon on insulator devices" @default.
- W2055737688 doi "https://doi.org/10.1116/1.584137" @default.
- W2055737688 hasPublicationYear "1988" @default.
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