Matches in SemOpenAlex for { <https://semopenalex.org/work/W2055823205> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2055823205 endingPage "3370" @default.
- W2055823205 startingPage "3368" @default.
- W2055823205 abstract "Chemical beam etching using AsCl3 has been shown to provide accurate etch rate control at the atomic level, mask feature transfer at submicron scale, and a clean damage-free surface for regrowth. The etching process can be maintained in a two-dimensional fashion, if the etching conditions are designed to enable efficient cation diffusion that smooths the microroughness. In this work, we show from etching the heavily Be-doped GaAs surface that the in situ etching prior to growth is potentially a useful method for etch cleaning the surface. However, the effectiveness of this method depends on the ability to form volatile species with the contaminant in competition with the formation of group III chloride." @default.
- W2055823205 created "2016-06-24" @default.
- W2055823205 creator A5006580713 @default.
- W2055823205 creator A5019464233 @default.
- W2055823205 creator A5022838722 @default.
- W2055823205 creator A5039846174 @default.
- W2055823205 creator A5076309422 @default.
- W2055823205 creator A5080109854 @default.
- W2055823205 date "1994-12-26" @default.
- W2055823205 modified "2023-09-27" @default.
- W2055823205 title "Surface cleaning of GaAs by <i>in</i> <i>situ</i> chemical beam etching" @default.
- W2055823205 cites W1970402577 @default.
- W2055823205 cites W1971375218 @default.
- W2055823205 cites W1985119024 @default.
- W2055823205 cites W1995316623 @default.
- W2055823205 cites W2027673652 @default.
- W2055823205 cites W2087484049 @default.
- W2055823205 cites W2094697775 @default.
- W2055823205 cites W2138165042 @default.
- W2055823205 cites W2002578640 @default.
- W2055823205 doi "https://doi.org/10.1063/1.112394" @default.
- W2055823205 hasPublicationYear "1994" @default.
- W2055823205 type Work @default.
- W2055823205 sameAs 2055823205 @default.
- W2055823205 citedByCount "12" @default.
- W2055823205 crossrefType "journal-article" @default.
- W2055823205 hasAuthorship W2055823205A5006580713 @default.
- W2055823205 hasAuthorship W2055823205A5019464233 @default.
- W2055823205 hasAuthorship W2055823205A5022838722 @default.
- W2055823205 hasAuthorship W2055823205A5039846174 @default.
- W2055823205 hasAuthorship W2055823205A5076309422 @default.
- W2055823205 hasAuthorship W2055823205A5080109854 @default.
- W2055823205 hasConcept C100460472 @default.
- W2055823205 hasConcept C1291036 @default.
- W2055823205 hasConcept C171250308 @default.
- W2055823205 hasConcept C178790620 @default.
- W2055823205 hasConcept C185592680 @default.
- W2055823205 hasConcept C192562407 @default.
- W2055823205 hasConcept C2777822432 @default.
- W2055823205 hasConcept C2779227376 @default.
- W2055823205 hasConcept C33220542 @default.
- W2055823205 hasConcept C49040817 @default.
- W2055823205 hasConceptScore W2055823205C100460472 @default.
- W2055823205 hasConceptScore W2055823205C1291036 @default.
- W2055823205 hasConceptScore W2055823205C171250308 @default.
- W2055823205 hasConceptScore W2055823205C178790620 @default.
- W2055823205 hasConceptScore W2055823205C185592680 @default.
- W2055823205 hasConceptScore W2055823205C192562407 @default.
- W2055823205 hasConceptScore W2055823205C2777822432 @default.
- W2055823205 hasConceptScore W2055823205C2779227376 @default.
- W2055823205 hasConceptScore W2055823205C33220542 @default.
- W2055823205 hasConceptScore W2055823205C49040817 @default.
- W2055823205 hasIssue "26" @default.
- W2055823205 hasLocation W20558232051 @default.
- W2055823205 hasOpenAccess W2055823205 @default.
- W2055823205 hasPrimaryLocation W20558232051 @default.
- W2055823205 hasRelatedWork W1482397683 @default.
- W2055823205 hasRelatedWork W1548170428 @default.
- W2055823205 hasRelatedWork W1592028115 @default.
- W2055823205 hasRelatedWork W1988940813 @default.
- W2055823205 hasRelatedWork W2585217187 @default.
- W2055823205 hasRelatedWork W2799230431 @default.
- W2055823205 hasRelatedWork W2949621209 @default.
- W2055823205 hasRelatedWork W3151785297 @default.
- W2055823205 hasRelatedWork W4284891372 @default.
- W2055823205 hasRelatedWork W51529165 @default.
- W2055823205 hasVolume "65" @default.
- W2055823205 isParatext "false" @default.
- W2055823205 isRetracted "false" @default.
- W2055823205 magId "2055823205" @default.
- W2055823205 workType "article" @default.