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- W2056121556 abstract "Misalignment and deviation angle in the optical interferometer directly decrease the accuracy of nanometrology system by producing a periodic nonlinearity error. In this paper, the effect of non-orthogonally polarized beams on the displacement measurement error in the advanced nanometrology system is presented. A system for reduction of non-orthogonality effect including linear polarizer, half-wave plate and modified signal conditioner, based on the nonlinearity compensation in a two-mode laser interferometer, is also proposed. The simulations results confirm that the peak error in the nano-displacement measurement is considerably decreased from 0.89 nm to 15 pm by using the modified optics and signal conditioner." @default.
- W2056121556 created "2016-06-24" @default.
- W2056121556 creator A5027098740 @default.
- W2056121556 creator A5031074985 @default.
- W2056121556 date "2008-07-01" @default.
- W2056121556 modified "2023-09-25" @default.
- W2056121556 title "Reduction of non-orthogonality effect in nanometrology system by modified optics and signal conditioner" @default.
- W2056121556 cites W1964796923 @default.
- W2056121556 cites W1977004163 @default.
- W2056121556 cites W1985815772 @default.
- W2056121556 cites W1987974640 @default.
- W2056121556 cites W2013928079 @default.
- W2056121556 cites W2019031263 @default.
- W2056121556 cites W2054698059 @default.
- W2056121556 cites W2061233529 @default.
- W2056121556 cites W2069439625 @default.
- W2056121556 cites W2079578353 @default.
- W2056121556 cites W2080947153 @default.
- W2056121556 cites W2150239038 @default.
- W2056121556 cites W2159697803 @default.
- W2056121556 cites W2164821076 @default.
- W2056121556 doi "https://doi.org/10.1109/csndsp.2008.4610751" @default.
- W2056121556 hasPublicationYear "2008" @default.
- W2056121556 type Work @default.
- W2056121556 sameAs 2056121556 @default.
- W2056121556 citedByCount "1" @default.
- W2056121556 crossrefType "proceedings-article" @default.
- W2056121556 hasAuthorship W2056121556A5027098740 @default.
- W2056121556 hasAuthorship W2056121556A5031074985 @default.
- W2056121556 hasConcept C107551265 @default.
- W2056121556 hasConcept C111335779 @default.
- W2056121556 hasConcept C120665830 @default.
- W2056121556 hasConcept C121332964 @default.
- W2056121556 hasConcept C121524040 @default.
- W2056121556 hasConcept C125743686 @default.
- W2056121556 hasConcept C148402106 @default.
- W2056121556 hasConcept C15744967 @default.
- W2056121556 hasConcept C166689943 @default.
- W2056121556 hasConcept C192562407 @default.
- W2056121556 hasConcept C195766429 @default.
- W2056121556 hasConcept C199360897 @default.
- W2056121556 hasConcept C2524010 @default.
- W2056121556 hasConcept C2779843651 @default.
- W2056121556 hasConcept C33923547 @default.
- W2056121556 hasConcept C41008148 @default.
- W2056121556 hasConcept C542102704 @default.
- W2056121556 hasConceptScore W2056121556C107551265 @default.
- W2056121556 hasConceptScore W2056121556C111335779 @default.
- W2056121556 hasConceptScore W2056121556C120665830 @default.
- W2056121556 hasConceptScore W2056121556C121332964 @default.
- W2056121556 hasConceptScore W2056121556C121524040 @default.
- W2056121556 hasConceptScore W2056121556C125743686 @default.
- W2056121556 hasConceptScore W2056121556C148402106 @default.
- W2056121556 hasConceptScore W2056121556C15744967 @default.
- W2056121556 hasConceptScore W2056121556C166689943 @default.
- W2056121556 hasConceptScore W2056121556C192562407 @default.
- W2056121556 hasConceptScore W2056121556C195766429 @default.
- W2056121556 hasConceptScore W2056121556C199360897 @default.
- W2056121556 hasConceptScore W2056121556C2524010 @default.
- W2056121556 hasConceptScore W2056121556C2779843651 @default.
- W2056121556 hasConceptScore W2056121556C33923547 @default.
- W2056121556 hasConceptScore W2056121556C41008148 @default.
- W2056121556 hasConceptScore W2056121556C542102704 @default.
- W2056121556 hasLocation W20561215561 @default.
- W2056121556 hasOpenAccess W2056121556 @default.
- W2056121556 hasPrimaryLocation W20561215561 @default.
- W2056121556 hasRelatedWork W1969772564 @default.
- W2056121556 hasRelatedWork W2033686348 @default.
- W2056121556 hasRelatedWork W2039110568 @default.
- W2056121556 hasRelatedWork W2055713924 @default.
- W2056121556 hasRelatedWork W2082836148 @default.
- W2056121556 hasRelatedWork W2273093762 @default.
- W2056121556 hasRelatedWork W2333321165 @default.
- W2056121556 hasRelatedWork W2341089689 @default.
- W2056121556 hasRelatedWork W2912753716 @default.
- W2056121556 hasRelatedWork W2945772931 @default.
- W2056121556 isParatext "false" @default.
- W2056121556 isRetracted "false" @default.
- W2056121556 magId "2056121556" @default.
- W2056121556 workType "article" @default.