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- W2056162236 abstract "The development of large-area in-line deposition technology of mixed oxide and nitride films is reviewed. Co-sputtering using C-Magtm rotatable cylindrical cathodes and different magnet angles is analyzed. The deposition rate, composition and physical properties of the films as a function of the substrate position along its movement direction are presented. The deposition results of some mixed oxides and nitrides prepared by co-sputtering from different pairs of elemental targets are reviewed." @default.
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- W2056162236 date "1991-12-01" @default.
- W2056162236 modified "2023-09-26" @default.
- W2056162236 title "Reactive co-sputtering of oxides and nitrides using a C-Magtm rotatable cylindrical cathode" @default.
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- W2056162236 doi "https://doi.org/10.1016/0257-8972(91)90048-2" @default.
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