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• W2056220721 endingPage "213" @default.
• W2056220721 startingPage "201" @default.
• W2056220721 abstract "The deposition of SiO2 films from alkoxysilane/O2 and alkoxysilane/N2O plasmas has been investigated using 1, 3, 5, 7-tetramethylcyclotetrasiloxane, dimethyldimethoxysilane, and trimethylsilane as Si precursors. Films were analyzed using Fourier transform infrared spectroscopy, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and scanning electron microscopy. Film deposition rates and hydrocarbon incorporation in the SiO2 films decrease with addition of O2 or N2O. High-quality SiO2 films are deposited at high oxidant concentrations with all three precursors. The effects of applied rf plasma power, substrate temperature, and substrate position in the reactor on film quality and deposition rate were also examined. Negative apparent activation energies for film deposition have been observed, suggesting a deposition process dominated by surface adsorption/desorption reactions. Gas phase species in these plasmas were studied with optical emission spectroscopy and mass spectrometry and are correlated with film deposition. For films deposited from low oxidant-containing plasmas, post deposition treatment with an O2 plasma serves to remove hydrocarbon contamination." @default.
• W2056220721 created "2016-06-24" @default.
• W2056220721 creator A5005831539 @default.
• W2056220721 creator A5067580558 @default.
• W2056220721 creator A5090952041 @default.
• W2056220721 date "2004-01-01" @default.
• W2056220721 modified "2023-10-09" @default.
• W2056220721 title "Mechanisms of SiO2 film deposition from tetramethylcyclotetrasiloxane, dimethyldimethoxysilane, and trimethylsilane plasmas" @default.
• W2056220721 cites W1597594609 @default.
• W2056220721 cites W1970297356 @default.
• W2056220721 cites W1976436730 @default.
• W2056220721 cites W1986871080 @default.
• W2056220721 cites W1992915945 @default.
• W2056220721 cites W1994440259 @default.
• W2056220721 cites W1996448605 @default.
• W2056220721 cites W1997497625 @default.
• W2056220721 cites W1999983836 @default.
• W2056220721 cites W2003103344 @default.
• W2056220721 cites W2011407402 @default.
• W2056220721 cites W2013225549 @default.
• W2056220721 cites W2014304949 @default.
• W2056220721 cites W2023359254 @default.
• W2056220721 cites W2034327584 @default.
• W2056220721 cites W2040200521 @default.
• W2056220721 cites W2040419448 @default.
• W2056220721 cites W2044694272 @default.
• W2056220721 cites W2046100495 @default.
• W2056220721 cites W2052447367 @default.
• W2056220721 cites W2058958512 @default.
• W2056220721 cites W2063301821 @default.
• W2056220721 cites W2070215100 @default.
• W2056220721 cites W2071535988 @default.
• W2056220721 cites W2077484297 @default.
• W2056220721 cites W2085508183 @default.
• W2056220721 cites W2088016367 @default.
• W2056220721 cites W2088362091 @default.
• W2056220721 cites W2093167502 @default.
• W2056220721 cites W2107098594 @default.
• W2056220721 cites W2127687977 @default.
• W2056220721 cites W2128169256 @default.
• W2056220721 cites W56842264 @default.
• W2056220721 doi "https://doi.org/10.1116/1.1635392" @default.
• W2056220721 hasPublicationYear "2004" @default.
• W2056220721 type Work @default.
• W2056220721 sameAs 2056220721 @default.
• W2056220721 citedByCount "27" @default.
• W2056220721 countsByYear W20562207212013 @default.
• W2056220721 countsByYear W20562207212014 @default.
• W2056220721 countsByYear W20562207212019 @default.
• W2056220721 countsByYear W20562207212020 @default.
• W2056220721 countsByYear W20562207212021 @default.
• W2056220721 countsByYear W20562207212023 @default.
• W2056220721 crossrefType "journal-article" @default.
• W2056220721 hasAuthorship W2056220721A5005831539 @default.
• W2056220721 hasAuthorship W2056220721A5067580558 @default.
• W2056220721 hasAuthorship W2056220721A5090952041 @default.
• W2056220721 hasConcept C107872376 @default.
• W2056220721 hasConcept C111368507 @default.
• W2056220721 hasConcept C113196181 @default.
• W2056220721 hasConcept C127313418 @default.
• W2056220721 hasConcept C127413603 @default.
• W2056220721 hasConcept C151730666 @default.
• W2056220721 hasConcept C160892712 @default.
• W2056220721 hasConcept C171250308 @default.
• W2056220721 hasConcept C175708663 @default.
• W2056220721 hasConcept C178790620 @default.
• W2056220721 hasConcept C18293161 @default.
• W2056220721 hasConcept C185592680 @default.
• W2056220721 hasConcept C19067145 @default.
• W2056220721 hasConcept C192562407 @default.
• W2056220721 hasConcept C2777289219 @default.
• W2056220721 hasConcept C2779439432 @default.
• W2056220721 hasConcept C2816523 @default.
• W2056220721 hasConcept C42360764 @default.
• W2056220721 hasConcept C64297162 @default.
• W2056220721 hasConcept C86803240 @default.
• W2056220721 hasConceptScore W2056220721C107872376 @default.
• W2056220721 hasConceptScore W2056220721C111368507 @default.
• W2056220721 hasConceptScore W2056220721C113196181 @default.
• W2056220721 hasConceptScore W2056220721C127313418 @default.
• W2056220721 hasConceptScore W2056220721C127413603 @default.
• W2056220721 hasConceptScore W2056220721C151730666 @default.
• W2056220721 hasConceptScore W2056220721C160892712 @default.
• W2056220721 hasConceptScore W2056220721C171250308 @default.
• W2056220721 hasConceptScore W2056220721C175708663 @default.
• W2056220721 hasConceptScore W2056220721C178790620 @default.
• W2056220721 hasConceptScore W2056220721C18293161 @default.
• W2056220721 hasConceptScore W2056220721C185592680 @default.
• W2056220721 hasConceptScore W2056220721C19067145 @default.
• W2056220721 hasConceptScore W2056220721C192562407 @default.
• W2056220721 hasConceptScore W2056220721C2777289219 @default.
• W2056220721 hasConceptScore W2056220721C2779439432 @default.
• W2056220721 hasConceptScore W2056220721C2816523 @default.
• W2056220721 hasConceptScore W2056220721C42360764 @default.
• W2056220721 hasConceptScore W2056220721C64297162 @default.
• W2056220721 hasConceptScore W2056220721C86803240 @default.
• W2056220721 hasIssue "1" @default.
• W2056220721 hasLocation W20562207211 @default.

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