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- W2056285012 endingPage "12122" @default.
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- W2056285012 abstract "A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for wafer-scale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20 pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation." @default.
- W2056285012 created "2016-06-24" @default.
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- W2056285012 date "2014-05-12" @default.
- W2056285012 modified "2023-09-25" @default.
- W2056285012 title "Hydrogenated amorphous silicon photonic device trimming by UV-irradiation" @default.
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- W2056285012 doi "https://doi.org/10.1364/oe.22.012122" @default.
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