Matches in SemOpenAlex for { <https://semopenalex.org/work/W2056349761> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2056349761 abstract "A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process design, simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures." @default.
- W2056349761 created "2016-06-24" @default.
- W2056349761 creator A5022767792 @default.
- W2056349761 creator A5026022315 @default.
- W2056349761 creator A5026805467 @default.
- W2056349761 creator A5051556912 @default.
- W2056349761 creator A5059120287 @default.
- W2056349761 creator A5072452255 @default.
- W2056349761 date "2005-12-28" @default.
- W2056349761 modified "2023-09-25" @default.
- W2056349761 title "Knowledge-based process simulation and design system for MEMS" @default.
- W2056349761 doi "https://doi.org/10.1117/12.638483" @default.
- W2056349761 hasPublicationYear "2005" @default.
- W2056349761 type Work @default.
- W2056349761 sameAs 2056349761 @default.
- W2056349761 citedByCount "0" @default.
- W2056349761 crossrefType "proceedings-article" @default.
- W2056349761 hasAuthorship W2056349761A5022767792 @default.
- W2056349761 hasAuthorship W2056349761A5026022315 @default.
- W2056349761 hasAuthorship W2056349761A5026805467 @default.
- W2056349761 hasAuthorship W2056349761A5051556912 @default.
- W2056349761 hasAuthorship W2056349761A5059120287 @default.
- W2056349761 hasAuthorship W2056349761A5072452255 @default.
- W2056349761 hasConcept C108882727 @default.
- W2056349761 hasConcept C121332964 @default.
- W2056349761 hasConcept C127413603 @default.
- W2056349761 hasConcept C133731056 @default.
- W2056349761 hasConcept C149635348 @default.
- W2056349761 hasConcept C154945302 @default.
- W2056349761 hasConcept C15744967 @default.
- W2056349761 hasConcept C174998907 @default.
- W2056349761 hasConcept C19417346 @default.
- W2056349761 hasConcept C199360897 @default.
- W2056349761 hasConcept C201995342 @default.
- W2056349761 hasConcept C21547014 @default.
- W2056349761 hasConcept C2775936607 @default.
- W2056349761 hasConcept C2780966626 @default.
- W2056349761 hasConcept C37135326 @default.
- W2056349761 hasConcept C37977207 @default.
- W2056349761 hasConcept C41008148 @default.
- W2056349761 hasConcept C48262172 @default.
- W2056349761 hasConcept C55396564 @default.
- W2056349761 hasConcept C62520636 @default.
- W2056349761 hasConcept C73752529 @default.
- W2056349761 hasConcept C98045186 @default.
- W2056349761 hasConceptScore W2056349761C108882727 @default.
- W2056349761 hasConceptScore W2056349761C121332964 @default.
- W2056349761 hasConceptScore W2056349761C127413603 @default.
- W2056349761 hasConceptScore W2056349761C133731056 @default.
- W2056349761 hasConceptScore W2056349761C149635348 @default.
- W2056349761 hasConceptScore W2056349761C154945302 @default.
- W2056349761 hasConceptScore W2056349761C15744967 @default.
- W2056349761 hasConceptScore W2056349761C174998907 @default.
- W2056349761 hasConceptScore W2056349761C19417346 @default.
- W2056349761 hasConceptScore W2056349761C199360897 @default.
- W2056349761 hasConceptScore W2056349761C201995342 @default.
- W2056349761 hasConceptScore W2056349761C21547014 @default.
- W2056349761 hasConceptScore W2056349761C2775936607 @default.
- W2056349761 hasConceptScore W2056349761C2780966626 @default.
- W2056349761 hasConceptScore W2056349761C37135326 @default.
- W2056349761 hasConceptScore W2056349761C37977207 @default.
- W2056349761 hasConceptScore W2056349761C41008148 @default.
- W2056349761 hasConceptScore W2056349761C48262172 @default.
- W2056349761 hasConceptScore W2056349761C55396564 @default.
- W2056349761 hasConceptScore W2056349761C62520636 @default.
- W2056349761 hasConceptScore W2056349761C73752529 @default.
- W2056349761 hasConceptScore W2056349761C98045186 @default.
- W2056349761 hasLocation W20563497611 @default.
- W2056349761 hasOpenAccess W2056349761 @default.
- W2056349761 hasPrimaryLocation W20563497611 @default.
- W2056349761 hasRelatedWork W2012496280 @default.
- W2056349761 hasRelatedWork W2018431286 @default.
- W2056349761 hasRelatedWork W2056349761 @default.
- W2056349761 hasRelatedWork W2067883633 @default.
- W2056349761 hasRelatedWork W2748779676 @default.
- W2056349761 hasRelatedWork W2947887852 @default.
- W2056349761 hasRelatedWork W4239963300 @default.
- W2056349761 hasRelatedWork W4377134201 @default.
- W2056349761 hasRelatedWork W1795478320 @default.
- W2056349761 hasRelatedWork W3113092988 @default.
- W2056349761 isParatext "false" @default.
- W2056349761 isRetracted "false" @default.
- W2056349761 magId "2056349761" @default.
- W2056349761 workType "article" @default.