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• W2056356261 abstract "A new control system design is proposed for the Czochralski process. A set of control objectives is proposed to meet the materials objectives and limitations posed by the coupling of the process (i.e., heater, melt, meniscus, interface, crystal and environment). Attention is given to the requirements for gallium arsenide growth including thermal stress in the growing crystal. Analysis of the process dynamics indicates the disturbances and dynamic features that must be considered in the controller design." @default.
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• W2056356261 date "1987-11-01" @default.
• W2056356261 modified "2023-09-26" @default.
• W2056356261 title "Advanced control design considerations for the Czochralski process" @default.
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• W2056356261 doi "https://doi.org/10.1016/0022-0248(87)90232-6" @default.
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