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- W2056372133 abstract "Ellipsometrically measured complex retractive index profiles in high energy P+31 ion implanted silicon have been compared with the phosphorus concentration profiles determined by in-depth profiling of the implanted surface using Auger electron spectroscopy in conjunction with in-situ ion sputtering. Structure was observed in the phosphorus profile which corresponds to structure in the complex refractive index profiles of unannealed specimens. This implies that the complex refractive index profile of the unannealed surface is sensitive to the concentration of the implanted species as well as the amount of structural disorder in the implanted layer. These results also indicate that the implanted phosphorus tends to build up in the more highly damaged regions, possibly through a radiation enhanced self-diffusion mechanism." @default.
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- W2056372133 date "1976-06-01" @default.
- W2056372133 modified "2023-10-16" @default.
- W2056372133 title "Complex refractive index and phosphorus concentration profiles in P+31 ion implanted silicon by ellipsometry and auger electron spectroscopy" @default.
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- W2056372133 doi "https://doi.org/10.1016/0039-6028(76)90455-6" @default.
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